EE 143: Microfabrication TechnologyLecture 18c: Diffusion IICTN 3/30/10Copyright © 2010 Regents of the University of CaliforniaLecture 18: Diffusion II• Announcements:• Midterms graded and passed back today• -------------------------------------• Lecture Topics:ªDiffusion― Basic Process for Selective Doping― Diffusion Modeling― Predeposition Modeling― Drive-in Modeling― Successive Diffusions― Diffusion Coefficient― Junction Depth― Sheet Resistance― Irvin’s Curves• -------------------------------------• Last Time:EE 143: Microfabrication TechnologyLecture 18c: Diffusion IICTN 3/30/10Copyright © 2010 Regents of the University of CaliforniaEE 143: Microfabrication TechnologyLecture 18c: Diffusion IICTN 3/30/10Copyright © 2010 Regents of the University of CaliforniaEE 143: Microfabrication TechnologyLecture 18c: Diffusion IICTN 3/30/10Copyright © 2010 Regents of the University of
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