EE 143: Microfabrication TechnologyLecture 14c: Etching ICTN 3/4/10Copyright © 2010 Regents of the University of CaliforniaLecture 14: Etching• Announcements:• Might need volunteers for Cal Day: if interested, sign up with your lab TA• Midterm Exam: coming Thursday, March 18ªEvening exam? 9 for different time; 14 for this period Æ so it’ll be during lecture• -------------------------------------• Lecture Topics:ªEtching― Anisotropy― Selectivity– Deep Reactive Ion Etching (DRIE)― Wet Etching― Dry Etching– Plasma Etching– Reactive Ion Etching (RIE)• -------------------------------------• Last Time:EE 143: Microfabrication TechnologyLecture 14c: Etching ICTN 3/4/10Copyright © 2010 Regents of the University of CaliforniaEE 143: Microfabrication TechnologyLecture 14c: Etching ICTN 3/4/10Copyright © 2010 Regents of the University of CaliforniaEE 143: Microfabrication TechnologyLecture 14c: Etching ICTN 3/4/10Copyright © 2010 Regents of the University of
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