EE 143 Microfabrication Technology Lecture 14c Etching I Lecture 14 Etching Announcements Might need volunteers for Cal Day if interested sign up with your lab TA Midterm Exam coming Thursday March 18 Evening exam 9 for different time 14 for this period so it ll be during lecture Lecture Topics Etching Anisotropy Selectivity Deep Reactive Ion Etching DRIE Wet Etching Dry Etching Plasma Etching Reactive Ion Etching RIE Last Time Copyright 2010 Regents of the University of California CTN 3 4 10 EE 143 Microfabrication Technology Lecture 14c Etching I Copyright 2010 Regents of the University of California CTN 3 4 10 EE 143 Microfabrication Technology Lecture 14c Etching I Copyright 2010 Regents of the University of California CTN 3 4 10 EE 143 Microfabrication Technology Lecture 14c Etching I Copyright 2010 Regents of the University of California CTN 3 4 10
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