MEMS Thermal Bimorph Important Details Beam length determined by ACTV mask 620 m Beam width determined by ACTV mask 80 m Width of ACTV CONT lip 8 m Resistor composed of three segments of varying linewidth Segment A W 24 m L 82 m L 62 m from edge of second contact Segment B W 8 m L 120 8 104 8 104 8 120 m Plus 6 corner squares Segment C W 24 m L 82 m L 62 m from edge of second contact
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