Berkeley
ELENG 143 -
MEMS Comb-Drive Actuators
School name
University of California, Berkeley
Pages 3
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EE 143 MICROFABRICATION TECHNOLOGY SPRING 2010 C Nguyen MEMS Comb Drive Actuators The new mask layout includes four comb drive actuators as marked below B C A D See the following links for the details about comb drive actuators 1 C T C Nguyen and R T Howe An integrated CMOS micromechanical resonator high Q oscillator IEEE J Solid State Circuits vol 34 no 4 pp 440455 April 1999 2 A GIF file of a vibrating comb drive Source Polytec GmbH EE 143 MICROFABRICATION TECHNOLOGY SPRING 2010 C Nguyen Comb width and spacing 5 m Shuttle width 13 m folded truss 12 m anchor size 8 20 m2 Beam length A 50 m B 100 m C 150 m and D 200 m Shuttles Folded truss Anchors Release mask EE 143 MICROFABRICATION TECHNOLOGY SPRING 2010 C Nguyen
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