EE 143 MICROFABRICATION TECHNOLOGY SPRING 2010 C. Nguyen MEMS Comb-Drive Actuators The new mask layout includes four comb-drive actuators as marked below. See the following links for the details about comb-drive actuators: 1. C. T.-C. Nguyen and R. T. Howe, “An integrated CMOS micromechanical resonator high-Q oscillator,” IEEE J. Solid-State Circuits, vol. 34, no. 4, pp. 440-455, April 1999. 2. A GIF file of a vibrating comb drive. [Source: Polytec GmbH] ABDCEE 143 MICROFABRICATION TECHNOLOGY SPRING 2010 C. Nguyen - Comb width and spacing = 5 m - Shuttle width = 13m, folded truss = 12m, anchor size = 8*20 m2 - Beam length = (A)50 m, (B)100 m, (C)150 m and (D)200 m Folded trussAnchorsRelease maskShuttlesEE 143 MICROFABRICATION TECHNOLOGY SPRING 2010 C.
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