EE 143: Microfabrication TechnologyLecture 11: Film Deposition ICTN 2/23/10Copyright © 2010 Regents of the University of CaliforniaLecture 11: Film Deposition• Announcements:ªModifications to lab procedure online• -------------------------------------• Lecture Topics:ªDopant Redistribution During Oxidationª Film Deposition― Evaporation― Sputtering― Chemical Vapor Deposition― CVD Reactions― Epitaxial Growth― Atomic Layer Deposition (ALD)ª Chemical Mechanical Polishing (CMP)• -------------------------------------• Last Time: oxidation modeling• Oxidation Graphs:• Go to Module 2 and discuss dopant segregation during oxidationEE 143: Microfabrication TechnologyLecture 11: Film Deposition ICTN 2/23/10Copyright © 2010 Regents of the University of CaliforniaEE 143: Microfabrication TechnologyLecture 11: Film Deposition ICTN 2/23/10Copyright © 2010 Regents of the University of CaliforniaEE 143: Microfabrication TechnologyLecture 11: Film Deposition ICTN 2/23/10Copyright © 2010 Regents of the University of
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