EE 143 Microfabrication Technology Lecture 11 Film Deposition I Lecture 11 Film Deposition Announcements Modifications to lab procedure online Lecture Topics Dopant Redistribution During Oxidation Film Deposition Evaporation Sputtering Chemical Vapor Deposition CVD Reactions Epitaxial Growth Atomic Layer Deposition ALD Chemical Mechanical Polishing CMP Last Time oxidation modeling CTN 2 23 10 Oxidation Graphs Go to Module 2 and discuss dopant segregation during oxidation Copyright 2010 Regents of the University of California EE 143 Microfabrication Technology Lecture 11 Film Deposition I Copyright 2010 Regents of the University of California CTN 2 23 10 EE 143 Microfabrication Technology Lecture 11 Film Deposition I Copyright 2010 Regents of the University of California CTN 2 23 10 EE 143 Microfabrication Technology Lecture 11 Film Deposition I Copyright 2010 Regents of the University of California CTN 2 23 10
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