EE 143 Microfabrication Technology Lecture 15c Etching II Lecture 15 Etching II Announcements Need volunteers for Cal Day April 17 Alumni prospective students visit Cal If interested sign up with your lab TA HW 6 Add problem 5 2 and 5 4 from Jaegar HW 6 due next Tuesday 3 16 10 Midterm Exam coming Thursday March 18 It ll be during lecture Review Session Time Tu 6 8 20 votes Lecture Topics Etching Anisotropy Selectivity Wet Etching Dry Etching Ion Milling Plasma Etching Reactive Ion Etching RIE Deep Reactive Ion Etching DRIE Chemical Mechanical Polishing CMP Ion Implantation Gaussian Distribution Range Straggle Lateral Straggle Masking Junction Depth Copyright 2010 Regents of the University of California CTN 3 9 10 Last Time EE 143 Microfabrication Technology Lecture 15c Etching II Copyright 2010 Regents of the University of California CTN 3 9 10 EE 143 Microfabrication Technology Lecture 15c Etching II Copyright 2010 Regents of the University of California CTN 3 9 10 EE 143 Microfabrication Technology Lecture 15c Etching II Copyright 2010 Regents of the University of California CTN 3 9 10
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