The TA Manual for EE143 Documentation from Fall 2002 Revision 0 Table of Contents The TA Manual for EE143 1 Table of Contents 2 Preface Motivation of Documentation 3 Head TA s responsibilities 4 Lab TA s responsibilities 5 TA Weekly Checklist 6 TA Checklist 6 Head TA Weekly Checklist 6 Week 0 7 Week 1 7 Week 2 8 Week 3 8 Week 4 9 Week 5 9 Week 6 10 Week 7 10 Week 8 10 Week 9 10 Week 10 11 Week 11 Prepare Answer Sheets for Report 1 11 Week 12 Grade Report 1 11 Week 13 Prepare Answer Sheets for Report 2 11 Week 14 11 Week 15 11 Appendix 12 Characterization of Exposure and Develop Times 12 Etch Rate Characterization 13 Mask Cleaning Process 14 Preface Motivation of Documentation Congratulations you have been selected to TA EE143 TA ing this course requires that the head TA and the other TA s work together in a seamless manner so that everything will run as smooth as possible during the semester In order for this semester to be a success for you and your students we have attempted to create a living document that will aid in the planning of the semester and inform you what is expected of you during the semester In the following documentation we have described the roles and responsibilities of each TA as well as provide a checklist of items that should be done each week We as the TA s for the fall semester of 2002 have created this document so that it may be passed from semester to semester allowing the knowledge of each of the TA groups to accumulate Therefore at the end of the semester you and your TA group will edit this document and add any insight that you deem necessary It is our goal that this manual will in the future make TA ing EE143 a great pleasure Good luck from the fall TA s of 2002 Paul Friedberg Eric Hobbs Paul Hung Min She TA Roles and Responsibilities Head TA s responsibilities Your responsibilities can be divided into two main categories First you are responsible for carrying out all of the processing that is listed in the processing manual with the notation done by TA Now this does not mean that you cannot enlist assistance from the lab TAs but it is your responsibility to at least organize this processing Second you will be working ahead of the lab TAs on the remaining processing sections meaning that you are responsible for thoroughly learning the operation of the lab equipment which will be used for a given week s lab well in advance so that you can pass your knowledge along to the lab TAs efficiently still in advance of the lab so that this information can be digested by the lab TAs Remember they spend many hours in lab working with students who expect things to go smoothly every time Of course snags will arise and this leads to stressful situations for the lab TAs By doing yo ur job well the occurrence of these situations can be minimized and in general the lab will go more smoothly Specific responsibilities 1 Ensure tool operation is satisfactory Interface with Microlab staff in the event of equipment problems 2 Learn tool operation well in advance 3 weeks or required lab use by students Ask for Microlab assistance of help from previous semester s head TAs and lab TAs 3 Hold an instructional session with current lab TAs well in advance 2 weeks of the required lab Use this session to teach the TAs equipment operation determine process parameters etch rates exposure times develop times length of furnace times which may deviate slightly from the specified values in the manual and to troubleshoot any problems which may arise with the processing a second chance to catch equipment malfunction 4 Take inventory of lab chemicals on Thursday before the following week s labs and submit a request to the Microlab for the required chemicals so that they will be delivered on Friday in plenty of time for Monday morning s potential lab session 5 Complete all processing tasks that are to be done by the TAs namely the field oxidation TCA clean before gate oxidation poly Si deposition and XeF2 etch Also procure all Microlab materials that will be needed for the furnace steps in the 143 lab cleaned quartz boats other quartz ware for the furnace steps 6 After processing is complete organize an evaluation of the lab manual and supporting documents by the lab TAs Make necessary changes additions Lab TA s responsibilities Your main responsibility is to create an environment during lab sessions that essentially encourages the students to learn about the processing modules rather than just follow the recipes and go through the motions Generally it seems as though when a lab session goes awry usually due to difficulty with lab equipment the students lose confidence that the lab sessions truly reflect any meaningful semiconductor processing flow and quickly lose interest in learning about the processes in lab Preventing this from happening more or less boils down to being extremely well prepared for your lab session In particular learning equipment operation and ensuring that the equipment is functional is a must The head TA will do most of the heavy lifting in this regard see head TA responsibilities but it is up to you to be sure that you understand the equipment as well as you need to so that you can project a measure of confidence when showing the operation to the students in your lab sessions Keep in mind that the head TA not only works ahead of you in terms of learning equipment operation and verifying functionality but also will carry out the processing steps labeled in the manual as done by TA So make the head TA s job easier by trying to be well prepared for lab you should be selfsufficient when you meet with students Specific responsibilities 1 Attend head TA instructional meetings Determine process parameters for lab two weeks in advance so that if things go awry there s an extra week to prepare assist in troubleshooting equipment problems and learn the proper operation of the equipment Also these sessions will be used to process the TA wafers 2 per session once correct process parameters have been determined These TA wafers will be distributed to students in the event of a broken or misprocessed student wafer and to assist in determining the process parameters testing equipment etc 2 Provide an update to all TAs and the course instructor following each lab session highlighting a problems encountered in the session b potential process parameter adjustments c control wafer measurements if any d chemical stock update e anything else that would be valuable for other session TAs
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