The TA Manual for EE143 Documentation from Fall 2002 Revision #0Table of Contents The TA Manual for EE143 ................................................................................................. 1 Table of Contents................................................................................................................ 2 Preface/Motivation of Documentation................................................................................ 3 Head TA’s responsibilities:............................................................................................. 4 Lab TA’s responsibilities:............................................................................................... 5 TA Weekly Checklist.......................................................................................................... 6 TA Checklist................................................................................................................... 6 Head TA Weekly Checklist ............................................................................................ 6 Week 0:....................................................................................................................... 7 Week 1:....................................................................................................................... 7 Week 2:....................................................................................................................... 8 Week 3:....................................................................................................................... 8 Week 4:....................................................................................................................... 9 Week 5:....................................................................................................................... 9 Week 6:..................................................................................................................... 10 Week 7:..................................................................................................................... 10 Week 8:..................................................................................................................... 10 Week 9:..................................................................................................................... 10 Week 10:................................................................................................................... 11 Week 11: Prepare Answer Sheets for Report #1................................................... 11 Week 12: Grade Report #1.................................................................................... 11 Week 13: Prepare Answer Sheets for Report #2................................................... 11 Week 14:................................................................................................................... 11 Week 15:................................................................................................................... 11 Appendix........................................................................................................................... 12 Characterization of Exposure and Develop Times ....................................................... 12 Etch Rate Characterization............................................................................................ 13 Mask Cleaning Process ................................................................................................. 14Preface/Motivation of Documentation Congratulations, you have been selected to TA EE143. TA’ing this course requires that the head TA and the other TA’s work together in a seamless manner so that everything will run as smooth as possible during the semester. In order for this semester to be a success for you and your students, we have attempted to create a living document that will aid in the planning of the semester and inform you what is expected of you during the semester. In the following documentation we have described the roles and responsibilities of each TA as well as provide a checklist of items that should be done each week. We, as the TA’s for the fall semester of 2002, have created this document so that it may be passed from semester to semester allowing the knowledge of each of the TA groups to accumulate. Therefore at the end of the semester you and your TA group will edit this document and add any insight that you deem necessary. It is our goal that this manual will, in the future, make TA’ing EE143 a great pleasure. Good luck from the fall TA’s of 2002: Paul Friedberg Eric Hobbs Paul Hung Min SheTA Roles and Responsibilities Head TA’s responsibilities: Your responsibilities can be divided into two main categories. First, you are responsible for carrying out all of the processing that is listed in the processing manual with the notation “done by TA.” Now, this does not mean that you cannot enlist assistance from the lab TAs, but it is your responsibility to at least organize this processing. Second, you will be working “ahead” of the lab TAs on the remaining processing sections, meaning that you are responsible for thoroughly learning the operation of the lab equipment which will be used for a given week’s lab well in advance, so that you can pass your knowledge along to the lab TAs efficiently, still in advance of the lab so that this information can be digested by the lab TAs. Remember, they spend many hours in lab working with students who expect things to go smoothly every time. Of course, snags will arise, and this leads to stressful situations for the lab TAs. By doing your job well, the occurrence of these situations can be minimized, and in general the lab will go more smoothly. Specific responsibilities: 1) Ensure tool operation is satisfactory. Interface with Microlab staff in the event of equipment problems. 2) Learn tool operation well in advance (~3 weeks) or required lab use by students. Ask for Microlab assistance of help from previous semester’s head TAs and lab TAs. 3) Hold an instructional session with current lab TAs well in advance (~2 weeks) of the required lab. Use this session to teach the TAs equipment operation, determine process parameters (etch rates, exposure times, develop times, length of furnace times, which may deviate slightly from the specified values in the manual) and to troubleshoot
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