1EE 143 Fall ’06 Lab TutorialKinyip Phoa, U.C. Berkeley Page 1-1EE 143Microfabrication TechnologyFall 2006 - Lab TutorialSeptember 1, 2006EE 143 Fall ’06 Lab TutorialKinyip Phoa, U.C. Berkeley Page 1-2Goal – I am here to:- discuss the lab-works before you enter and work in the lab- help you understand the lab better- help you get a better grade on lab- answer questions you have for previous and subsequent labs- answer questions you have on lab reports- in general, help you outIn order to achieve the above more successfully and effectively,I want your feedback from time to time.EE 143 Fall ’06 Lab TutorialKinyip Phoa, U.C. Berkeley Page 1-3Day: MondayTime: 4pm – 5pmPlace: will be confirmed laterEmail: [email protected].: none, sent email to ask me questions, pleaseMaterial:- slides, will be uploaded weekly- lab manual, will be best if you’ve read them before comingEE 143 Fall ’06 Lab TutorialKinyip Phoa, U.C. Berkeley Page 1-4Week 2:- brief intro to the lab- chip layout & process flow- safety, cleaning, chemical disposal rules-a virtual tour to the lab2EE 143 Fall ’06 Lab TutorialKinyip Phoa, U.C. Berkeley Page 1-5Intro:- You learn the theories in class; you practice them in lab- You are going to make resistors, diodes, MOS-capbipolar transistor, MOS-transistor, …some MEMS structures, like bimorphs, …- By the end of the semester, you should have learntbasic lab techniqueshow to operate some of the equipmentshow to characterize the devices you madeEE 143 Fall ’06 Lab TutorialKinyip Phoa, U.C. Berkeley Page 1-5EE 143 Fall ’06 Lab TutorialKinyip Phoa, U.C. Berkeley Page 1-11Process Flow:EE 143 Fall ’06 Lab TutorialKinyip Phoa, U.C. Berkeley Page 1-12Process Flow (cont.):3EE 143 Fall ’06 Lab TutorialKinyip Phoa, U.C. Berkeley Page 1-6Cleaning:- only enter the clean room fully gownedhair net + lab coat + glove + shoe net + safety goggle- do NOT touch chemicals / equipments with bare hand- always handle wafers with tweezers and trays (unless told otherwise)- wash hand before and after entering the lab (why??)before: so not to contaminate wafers or equipmentafter: avoid chemicals being indigested- Next week, GSIs will demonstrate how to clean up masks-4thweek, GSIs will demonstrate how to piranha-clean wafersEE 143 Fall ’06 Lab TutorialKinyip Phoa, U.C. Berkeley Page 1-7Safety:- do NOT enter the lab when GSI aren’t present, under all conditions- know all the emergency exits (ask the GSIs to show you)- know where to find the MSDSunder the whiteboard in characterization room- know where to find the closet water sources, shower, eye wash- ask whenever not clear- do NOT try things out without permissions- NO eating, drinking, playing, … inside the labThings in the lab can be dangerous if not carefully handled. Be sure to respect the chemicals.EE 143 Fall ’06 Lab TutorialKinyip Phoa, U.C. Berkeley Page 1-8Safety: Chemical Handling- wear protective gears when handling corrosive chemicalsface shield, chemical apron, chemical gloverespirator if necessary- check glove for holesblow with N2, then submerge in water- check pH of unknown spillage, label everything- corrosive chemicals: H2SO4, HF, aluminum etch, TMAH- wash and rinse the exposed part with water for > 15mins- add acids to water, not the other way around (why??)potential spilling if add water to acid- handle wet chemicals only at sinks, acid on right, others on left sideEE 143 Fall ’06 Lab TutorialKinyip Phoa, U.C. Berkeley Page 1-9Safety: Chemical Handling- HF: be very very careful, can be deadlywhen you feel it, it is attacking you bonewill keep eating your bone, without being consumedapply calcium gluconate if exposure is suspecteduse only plastic beakers for HF (why??)-H2SO4: should be very painful, severely burnt when in touchadd H2O2to H2SO4to prepare piranhado not carry the beaker around after mixing (HOT!!)use only glass beakers for piranha (why??)Chemicals used in the lab are harmful one way or the other. Don’t breathe and avoid exposure if possible.Use teflon-wares when handling wafers in acids. Be careful, those teflon tweezers do not hold the wafers very well!!4EE 143 Fall ’06 Lab TutorialKinyip Phoa, U.C. Berkeley Page 1-10Safety: Chemical Disposal- water-soluble chemicals should be aspirated- organic chemicals are discarded in designated containerhowever, in this lab, photoresist (PR) are also dumped down the drain.- do NOT mix organic wastes with acids (why??)can cause fire or even explosion- do NOT mix acids and bases- when needed to aspirate acid, bases, organic solvents, aspirate a beaker of water as bufferEE 143 Fall ’06 Lab TutorialKinyip Phoa, U.C. Berkeley Page 1-13Lab Floor Plan:Note: Not drawn in scaleIf time allows, you can ask your GSI to show you the clean room!EE 143 Fall ’06 Lab TutorialKinyip Phoa, U.C. Berkeley Page 1-14Next Next Week:- discuss what you have to in the lab- briefly go over how to operate the spinner and mask aligner- review how to handling and drying wafers- review rules of handling
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