EE 143 Fall 06 Lab Tutorial EE 143 Fall 06 Lab Tutorial Goal I am here to discuss the lab works before you enter and work in the lab help you understand the lab better EE 143 help you get a better grade on lab answer questions you have for previous and subsequent labs Microfabrication Technology answer questions you have on lab reports Fall 2006 Lab Tutorial in general help you out September 1 2006 In order to achieve the above more successfully and effectively I want your feedback from time to time Kinyip Phoa U C Berkeley EE 143 Fall 06 Page 1 1 Lab Tutorial Kinyip Phoa U C Berkeley EE 143 Fall 06 Day Monday Week 2 Time 4pm 5pm brief intro to the lab Page 1 2 Lab Tutorial chip layout process flow Place will be confirmed later safety cleaning chemical disposal rules Email kinyip eecs berkeley edu a virtual tour to the lab O H none sent email to ask me questions please Material slides will be uploaded weekly lab manual will be best if you ve read them before coming Kinyip Phoa U C Berkeley Page 1 3 Kinyip Phoa U C Berkeley Page 1 4 1 EE 143 Fall 06 Lab Tutorial EE 143 Fall 06 Lab Tutorial Intro You learn the theories in class you practice them in lab You are going to make resistors diodes MOS cap bipolar transistor MOS transistor some MEMS structures like bimorphs By the end of the semester you should have learnt basic lab techniques how to operate some of the equipments how to characterize the devices you made Kinyip Phoa U C Berkeley EE 143 Fall 06 Page 1 5 Lab Tutorial Process Flow Kinyip Phoa U C Berkeley Kinyip Phoa U C Berkeley EE 143 Fall 06 Page 1 5 Lab Tutorial Process Flow cont Page 1 11 Kinyip Phoa U C Berkeley Page 1 12 2 EE 143 Fall 06 Lab Tutorial EE 143 Fall 06 Lab Tutorial Cleaning Safety only enter the clean room fully gowned hair net lab coat glove shoe net safety goggle do NOT enter the lab when GSI aren t present under all conditions know all the emergency exits ask the GSIs to show you do NOT touch chemicals equipments with bare hand know where to find the MSDS under the whiteboard in characterization room always handle wafers with tweezers and trays unless told otherwise wash hand before and after entering the lab why before so not to contaminate wafers or equipment after avoid chemicals being indigested know where to find the closet water sources shower eye wash ask whenever not clear do NOT try things out without permissions Next week GSIs will demonstrate how to clean up masks NO eating drinking playing inside the lab 4th week GSIs will demonstrate how to piranha clean wafers Things in the lab can be dangerous if not carefully handled Be sure to respect the chemicals Kinyip Phoa U C Berkeley EE 143 Fall 06 Page 1 6 Lab Tutorial Kinyip Phoa U C Berkeley Page 1 7 EE 143 Fall 06 Lab Tutorial Safety Chemical Handling Safety Chemical Handling wear protective gears when handling corrosive chemicals face shield chemical apron chemical glove respirator if necessary HF check glove for holes blow with N2 then submerge in water H2SO4 should be very painful severely burnt when in touch add H2O2 to H2SO4 to prepare piranha do not carry the beaker around after mixing HOT use only glass beakers for piranha why check pH of unknown spillage label everything corrosive chemicals H2SO4 HF aluminum etch TMAH wash and rinse the exposed part with water for 15mins Chemicals used in the lab are harmful one way or the other Don t breathe and avoid exposure if possible add acids to water not the other way around why potential spilling if add water to acid Use teflon wares when handling wafers in acids Be careful those teflon tweezers do not hold the wafers very well handle wet chemicals only at sinks acid on right others on left side Kinyip Phoa U C Berkeley be very very careful can be deadly when you feel it it is attacking you bone will keep eating your bone without being consumed apply calcium gluconate if exposure is suspected use only plastic beakers for HF why Page 1 8 Kinyip Phoa U C Berkeley Page 1 9 3 EE 143 Fall 06 Lab Tutorial Safety Chemical Disposal EE 143 Fall 06 Lab Tutorial Lab Floor Plan water soluble chemicals should be aspirated Note Not drawn in scale organic chemicals are discarded in designated container however in this lab photoresist PR are also dumped down the drain do NOT mix organic wastes with acids why can cause fire or even explosion do NOT mix acids and bases when needed to aspirate acid bases organic solvents aspirate a beaker of water as buffer If time allows you can ask your GSI to show you the clean room Kinyip Phoa U C Berkeley EE 143 Fall 06 Page 1 10 Kinyip Phoa U C Berkeley Page 1 13 Lab Tutorial Next Next Week discuss what you have to in the lab briefly go over how to operate the spinner and mask aligner review how to handling and drying wafers review rules of handling acids Kinyip Phoa U C Berkeley Page 1 14 4
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