Berkeley
ELENG 143 -
Fabrication process flow
School name
University of California, Berkeley
Pages 3
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Fabrication Process Flow Week 2 Field Oxidation 5200 A Week 3 Active Area Photolithography Week 4 Gate Oxidation 800 A Week 5 Poly Si Deposition Week 6 Gate Photolithography Week 6 Clear Source and Drain Week 7a Source Drain Deposition N Week 7b Spin on Glass Strip Week 7b Drive In Oxidation Week 8 Contact Hole Cut Mask 3 CONT Week 9 Metallization Week 10 Metal Definition Note These figures are only crude representations of the actual cross sections You must draw more accurate pictures during quizzes and especially in the lab reports
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