Fabrication Process Flow:Week 2: Field Oxidation - 5200 AWeek 3: Active Area PhotolithographyWeek 4: Gate Oxidation - 800 AWeek 5: Poly-Si DepositionWeek 6: Gate PhotolithographyWeek 6: Clear Source and DrainWeek 7a: Source-Drain Deposition (N+)Week 7b: Spin-on Glass StripWeek 7b: Drive-In OxidationWeek 8: Contact-Hole Cut (Mask #3 - CONT)Week 9: MetallizationWeek 10: Metal DefinitionFabrication Process Flow:Week 2: Field Oxidation - 5200 AWeek 3: Active Area PhotolithographyWeek 4: Gate Oxidation - 800 AWeek 5: Poly-Si DepositionWeek 6: Gate PhotolithographyWeek 6: Clear Source and DrainWeek 7a: Source-Drain Deposition (N+)Week 7b: Spin-on Glass StripWeek 7b: Drive-In OxidationWeek 8: Contact-Hole Cut (Mask #3 - CONT)Week 9: MetallizationWeek 10: Metal DefinitionNote: These figures are only crude representations of the actual cross sections. You must draw moreaccurate pictures during quizzes and especially in the lab
View Full Document
Unlocking...