2A & 2B – 4155B - SHEET Mode F1P F2P S1P S2P F1P S1P F2P S2P SMU1 SMU2 SMU4 SMU3 SMU1 SMU2 SMU3 SMU4 Settings Stimulus Measure Sweep F1P (SMU4) Current Current Sweep Start -0.1 Stop 0.1 Compliance 5 F2P (SMU3) Voltage Constant S1P (SMU1) Current Voltage Constant Compliance 5 S2P (SMU1) Current Voltage Constant Compliance 5 1Jeonggi Seo 11-09-2004 EE143 – Characterization of Devices -----Copyright material®2C & 2D - 4155B - RESISTOR Mode A B A B SMU1 SMU2 SMU1 SMU2 Settings Stimulus Measure Sweep A Voltage Voltage Current Sweep Start -5 Stop 5 B Constant 2Jeonggi Seo 11-09-2004 EE143 – Characterization of Devices -----Copyright material®7 - 4155B - DIODE mode Please make sure to connect a stage connector to “SMU2.” Settings Stimulus Measure Sweep Sweep A Voltage Voltage Current Sweep Start -1 Stop 1 Sweep Start -40 Stop 40 Compliance 0.05 K Constant -40 Compliance 0.05 A K A SMU1 SMU2 SMU1 3Jeonggi Seo 11-09-2004 EE143 – Characterization of Devices -----Copyright material®8, 9, 10, 11, & 12 - 4155B - MOSFET mode D SMU1 SMU1 SMU2 SMU3 SMU4 G D S B S G SMU2 SMU3 Please make sure to connect a stage connector to “SMU4.” Setting for Measurement #1 Stimulus Measure Sweep D Voltage Voltage Current Sweep Start 0 Stop 5 S Voltage Constant B Voltage Constant G Voltage Step Start 0 Stop 5 Step size 1 4Jeonggi Seo 11-09-2004 EE143 – Characterization of Devices -----Copyright material®Setting for Measurement #2 Don’t forget to turn off the light of the microscope. The light will induce much noise. Stimulus Measure Sweep D Voltage Current Constant 0.05 S Voltage Constant B Voltage Step Start 0 Stop -2 Step size -1 G Voltage Voltage Sweep Start 0 Stop (Device #8 up to 12) (Others up to 5) 5Jeonggi Seo 11-09-2004 EE143 – Characterization of Devices -----Copyright material®14 - 4155B - MOSFET mode D SMU1 SMU2 SMU3 SMU4 G D S B B G SMU4 S SMU1 SMU2 SMU3 Please make sure to connect a stage connector to “SMU3.” Setting for Measurement Stimulus Measure Sweep D Voltage Step Start 5 Stop 15 Step size 5 S Voltage Constant B Current Voltage Constant G Voltage Voltage Sweep Start -5 Stop 5 6Jeonggi Seo 11-09-2004 EE143 – Characterization of Devices -----Copyright material®3 & 4 - 4284 - CAP mode HP4284.CMH A SMU4 HP4284.CML K A Please make sure to connect a stage connector to “SMU1.” Zero calibration : Meas setup – Change to Mega Hz (Use cursor keys and screen keys)– Meas setup - correction (Use screen keys)- Enlight “open” (Use cursor keys)– Measure open (Wait a few minutes until it said completed)– Display Notice that you need one measurement of Device #3 without light and two measurements of Device #4 with light and without light. Settings HP4284.CMH Display1 : C Display2: R Oscillation level : 0.02 Circuit mode : Par Device #3 Sweep : Voltage Start -10 Stop 10 Step size : 0.2 Option: integration Medium Device #4 Sweep : Voltage Start -5 Stop 5 Step size : 0.2 Option: integration Medium HP4284.CML No need to change 7Jeonggi Seo 11-09-2004 EE143 – Characterization of Devices -----Copyright material®5 - 4284 - CAP mode SMU1 SMU4 K HP4284.CMH HP4284.CML A K A Disconnect the stage connection from SMU1 and connect #1 probe to SMU1. When you measure capacitance, you will notice negative values of capacitance. Do two measurements. One measurement is with a probed device and the other without a probed device. So that a real capacitance = C (with) – C (Without). Make sure of tuning off light Settings HP4284.CMH Display1 : C Display2: R Circuit mode : Par Oscillation level : 0.02 Device #5 Sweep : Voltage Start -5 Stop 0 Step size : 0.2 HP4284.CML No need to change 8Jeonggi Seo 11-09-2004 EE143 – Characterization of Devices -----Copyright
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