2A 2B 4155B SHEET Mode SMU4 SMU4 SMU1 F1P SMU1 S1P F1P S1P S2P SMU2 F2P S2P SMU3 F2P SMU3 SMU2 Settings F1P SMU4 Stimulus Measure Sweep Current Current Sweep Start 0 1 Stop 0 1 Compliance 5 F2P SMU3 Voltage S1P SMU1 Current Constant Voltage Constant Compliance 5 S2P SMU1 Current Voltage Constant Compliance 5 Jeonggi Seo 11 09 2004 EE143 Characterization of Devices Copyright material 1 2C 2D 4155B RESISTOR Mode SMU1 SMU1 A SMU2 A B B SMU2 Settings A Stimulus Measure Sweep Voltage Voltage Sweep Current Start 5 Stop 5 B Constant Jeonggi Seo 11 09 2004 EE143 Characterization of Devices Copyright material 2 7 4155B DIODE mode SMU1 A SMU2 SMU1 K A Please make sure to connect a stage connector to SMU2 Settings A Stimulus Measure Sweep Sweep Voltage Voltage Sweep Sweep Current Start 1 Start 40 Stop 1 Stop 40 Compliance 0 05 K Constant 40 Compliance 0 05 Jeonggi Seo 11 09 2004 EE143 Characterization of Devices Copyright material 3 8 9 10 11 12 4155B MOSFET mode SMU1 D SMU1 SMU4 SMU2 B G D S G SMU3 SMU2 S SMU3 Please make sure to connect a stage connector to SMU4 Setting for Measurement 1 D Stimulus Measure Sweep Voltage Voltage Sweep Current Start 0 Stop 5 S Voltage Constant B Voltage Constant G Voltage Step Start 0 Stop 5 Step size 1 Jeonggi Seo 11 09 2004 EE143 Characterization of Devices Copyright material 4 Setting for Measurement 2 Don t forget to turn off the light of the microscope The light will induce much noise Stimulus Measure Sweep D Voltage Current Constant 0 05 S Voltage Constant B Voltage Step Start 0 Stop 2 Step size 1 G Voltage Voltage Sweep Start 0 Stop Device 8 up to 12 Others up to 5 Jeonggi Seo 11 09 2004 EE143 Characterization of Devices Copyright material 5 14 4155B MOSFET mode SMU1 SMU1 SMU4 D D SMU4 SMU2 G B G B S SMU2 S SMU3 SMU3 Please make sure to connect a stage connector to SMU3 Setting for Measurement Stimulus D Measure Voltage Sweep Step Start 5 Stop 15 Step size 5 S Voltage Constant B Current Voltage Constant G Voltage Voltage Sweep Start 5 Stop 5 Jeonggi Seo 11 09 2004 EE143 Characterization of Devices Copyright material 6 3 4 4284 CAP mode HP4284 CML HP4284 CMH A K SMU4 A Please make sure to connect a stage connector to SMU1 Zero calibration Meas setup Change to Mega Hz Use cursor keys and screen keys Meas setup correction Use screen keys Enlight open Use cursor keys Measure open Wait a few minutes until it said completed Display Notice that you need one measurement of Device 3 without light and two measurements of Device 4 with light and without light Settings HP4284 CMH HP4284 CML Display1 C Oscillation level 0 02 Device 3 Device 4 Display2 R Circuit mode Par Sweep Voltage Sweep Voltage Start 10 Start 5 Stop 10 Stop 5 Step size 0 2 Step size 0 2 Option integration Option integration Medium Medium No need to change Jeonggi Seo 11 09 2004 EE143 Characterization of Devices Copyright material 7 5 4284 CAP mode HP4284 CML A HP4284 CMH SMU1 SMU4 A K K Disconnect the stage connection from SMU1 and connect 1 probe to SMU1 When you measure capacitance you will notice negative values of capacitance Do two measurements One measurement is with a probed device and the other without a probed device So that a real capacitance C with C Without Make sure of tuning off light Settings HP4284 CMH Display1 C Circuit mode Par Device 5 Display2 R Oscillation level 0 02 Sweep Voltage Start 5 Stop 0 Step size 0 2 HP4284 CML No need to change Jeonggi Seo 11 09 2004 EE143 Characterization of Devices Copyright material 8
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