EE143 F2010 Lecture 1 EE143 Teaching Staff Instructor Prof Nathan Cheung cheung eecs berkeley edu Cory 513 642 1615 Lecture Hours and Place Tu Th 2 10 3 30pm Cory 277 Office Hours Tu 1pm 2pm Th 12 1pm and by appointment GSIs Byron Ho Head TA bho eecs berkeley edu Office Hours Friday 12 1pm CORY 381 Chenlu Hou clhou berkeley edu Office Hours Monday 1 30 2 30 pm CORY 381 Wookhyun Kwon whkwon10 eecs berkeley edu Office Hours Wed 12 1pm CORY 381 Professor N Cheung U C Berkeley EE143 F2010 Lecture 1 EE143 Fall 2010 Weekly Schedule Monday Tuesday Wednesday Thursday 9 00 LAB 1 LAB 2 9 30 Byron Ho Wookhyun Kwon Chenlu Hou LAB 4 Friday LAB 5 Chenlu Hou 10 00 10 30 11 00 11 30 12 00 Cheung Office Hour 12 30 CORY 513 13 00 Cheung Office Hour 13 30Chenlu Hou Office Hr 14 00 CORY 381 CORY 513 Wookhyun Kwon Office Hr CORY 381 LECTURE LAB 3 14 30 Cory 277 Wookhyun Kwon Cory 277 15 00 Cheung Byron Ho Office Hr CORY 381 LECTURE Cheung 15 30 16 00 16 30 Professor N Cheung U C Berkeley 2 EE143 F2010 Lecture 1 EE143 Lab Sign up 5 Lab Sections Tu 2 5pm W 9 12am W 2 5pm Th 2 5pm Fri 9 12am Fill in Doodle poll http www doodle com rtpbrmm7bzfm3b45 before 8 28 Friday 5pm Your assigned lab section will be posted online before 8 30 Lab attendance is mandatory for Week of 8 30 You will have lab orientation and have to pass a safety quiz before you are officially enrolled in this course Professor N Cheung U C Berkeley EE143 F2010 Lecture 1 Course Website http www inst eecs berkeley edu ee143 Required Text R C Jaeger Introduction To Microelectronics Fabrication 2nd Edition Reprints and Lecture Notes Homework Posted every Tue online due following Friday at 9am Your best ten efforts will be counted towards your course grade Grading Midterm1 15 Midterm2 15 Final 30 Homework 10 Lab 30 Undergrads and Grads will be graded as two separate groups Professor N Cheung U C Berkeley 4 EE143 F2010 Lecture 1 Other Websites of EE143 Interest Device Physics Process Visualization Highly recommended http jas eng buffalo edu MEMS operation Good collection of photos and movies http mems sandia gov scripts index asp Trend and Roadmap http public itrs net Forecast http www icknowledge com Professor N Cheung U C Berkeley 5 EE143 F2010 What is EE143 all about Microfabrication Principles for IC and MEMS Hands on Fabrication and Testing of IC and MEMS Devices Professor N Cheung U C Berkeley 6 Lecture 1 EE143 F2010 Lecture 1 EE143 Chip Fabrication Professor N Cheung U C Berkeley 7 EE143 F2010 Photograph of EE143 Wafer Professor N Cheung U C Berkeley Lecture 1 EE143 F2010 EE143 Lab Processing Equipment Professor N Cheung U C Berkeley Lecture 1 9 EE143 F2010 Lecture 1 EE143 Chip Characterization 17 stage Ring Oscillator Professor N Cheung U C Berkeley 10 EE143 F2010 Lecture 1 After resist patterning on nitride pad oxide Process Simulation of Topography and Device Structure After Poly Si Gate Patterning After Local Oxidation Professor N Cheung U C Berkeley 11 EE143 F2010 Professor N Cheung U C Berkeley Lecture 1 EE143 F2010 Professor N Cheung U C Berkeley Lecture 1 13 EE143 F2010 Lecture 1 A benchmark of Top down Approach 5nm Gate Nanowire FinFET 2004 Symposium on VLSI Technology p 196 Professor N Cheung U C Berkeley EE143 F2010 Professor N Cheung U C Berkeley Lecture 1 EE143 F2010 Professor N Cheung U C Berkeley Lecture 1 16 EE143 F2010 Lecture 1 Another Perspective on Moore s Law we are already producing 1018 transistors per year Enough to supply every ant on the planet with ten transistors Transistor cost cost of one letter in NY Times P Silverman 2005 Professor N Cheung U C Berkeley EE143 F2010 Lecture 1 Chip Power consumption is a big concern Professor N Cheung U C Berkeley 18 Source Intel Developer Forum 2002 EE143 F2010 Lecture 1 Commercial MEMS Products Optomechanical Displays TI 1996 Professor N Cheung U C Berkeley Acceleratometer Analog Devices 19 EE143 F2010 Lecture 1 MEMS Pressure Transducer Si Pyrex Glass Bulk Micromachining Si wafer Surface Micromachining Professor N Cheung U C Berkeley 20 EE143 F2010 Lecture 1 MEMS Actuators Gear Speed Reduction Unit Movable Mirror Responsive Drug Delivery Valve Turbine engine Professor N Cheung U C Berkeley 21 EE143 F2010 Lecture 1 MEMS IC Integration Sandia National Lab MEMS fabricated in 12 m deep trench Filled with SiO2 and planarized using CMP Professor N Cheung U C Berkeley 22 EE143 F2010 Linking Si Technology with Biology Lecture 1 Snail neuron grown atop an Infineon Technologies CMOS device that measures the neuron s electrical activity linking chips and living cells Source Max Planck Institute Professor N Cheung U C Berkeley EE143 F2010 Lecture 1 Responsive Drug Delivery Systtem Professor N Cheung U C Berkeley Source Madou Lab Chip 3 26 28N 2003 24 EE143 F2010 Heterogeneous Integration of Microsystems Lecture 1 Professor Nathan Cheung EECS BioMEMS Emitters Filter Detectors GeOI Green LED Low Voltage High mobility semiconductor CPU Encapsulated battery with switch LED Blue LED 5mm 200 m MOS IC III V Micro LED display pump Laser Array Laser Photo Emitter Emitter Arrays Photonics on Si Optical Micro Modulator mirrors Micro fluidic channels Encapsulated Power source 1 m Professor N Cheung U C Berkeley Si microfluidic channels UltraBright LED EE143 F2010 Lecture 1 Large Area Processing Flat Panel Displays Professor N Cheung U C Berkeley 26 EE143 F2010 Lecture 1 Large Area Processing Photovoltiacs The Grid Parity Challenge US 1 Watt Professor N Cheung U C Berkeley EE143 F2010 Environmental Impact of the Semiconductor Industry Lecture 1 Impact per square inch of Si integrated circuit Output from the Fab Liquid Waste Hazardous Waste Toxic Releases Professor N Cheung U C Berkeley 75 Gal in 2 0 1 Kg in 2 0 01 Kg in 2 Input to the Fab Water Electricity Chemicals 30 gal in 2 10 KWhr in 2 0 2 kg in 2 28
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