EE143 Microfabrication TechnologyScheduleReading MaterialGradingCourse InformationCourse ScheduleLaboratory InformationLab SafetyCourse Structure – Lab and LectureThe EE143 ChipLab CleanlinessLab SafetyChemical HandlingChemical Handling (cont’d)Chemical DisposalLab Floor PlanEE143 OverviewFabricated StructuresElectrical Functionality / CharacterizationSlide Number 20Slide Number 21Slide Number 22TerminologyFoundry (Fab)Cleanroom StandardsSlide Number 26 Oxidation of SiliconSlide Number 28Slide Number 29Slide Number 30Module: Ion ImplantationWhat is process integration?The EE143 Lab Process (part I)The EE143 Lab Process (Part II)EE143 – Ali Javey Slide 0-1EE143 Microfabrication TechnologyProfessor: Ali [email protected] Cory Hall(510) 643-7263TAs: SangHoon Lee, [email protected] Matheu, [email protected] Wyrwas, [email protected] Page: http://www-inst.eecs.berkeley.edu/~ee143/EE143 – Ali Javey Slide 0-2Schedule• Lectures: Tue/Thu, 3:30pm-5pm• Labs (218 Cory) – only 5 of the following 6 sections will be offered:– M 2-5P, 218 CORY– Tu 10-1P, 218 CORY– W 9-12P, 218 CORY– Th 11-2P, 218 CORY– F 9-12P, 218 CORYLAB SECTIONS WILL BEGIN ON January 28th• Office Hours:– Ali Javey (Cory Hall, 506)Wednesdays, 10-11 am– TAs (TBD)EE143 – Ali Javey Slide 0-3Reading Material• Primary Text:Introduction To Microelectronic FabricationR. C. JaegerPrentice Hall• Reference Texts:Semiconductor Device FundamentalsR. F. PierretAddison WesleyDevice Electronics for Integrated CircuitsR. S. Muller and T. I. KaminsWileyEE143 – Ali Javey Slide 0-4Grading– Laboratory• Includes quizzes, lab work, and reports– Homeworks• Assigned on Thursdays, due the following week in class• You must work on your own– Tests (2-3)• ~75 minutes each• given periodically per schedule• Open book and notes• No makeups– Final Examination• Friday, Dec. 15th, 12:30pm- 3:30pm• Open book and notes• No makeups30%30%Letter grades will be assigned based approximately on the following scale:A+: 95-100A: 88-95A-: 85-88B+: 80-85 B: 73-80 B-: 68-73C+: 65-68 C: 60-65 C-: 55-60D: 40-55 F: <4030%10%EE143 – Ali Javey Slide 0-5Course Information• Prerequisites:– EE40/E100 and Physics 7B or equivalent• Course Description– EE143 teaches the fundamentals of integrated-circuit (IC) fabrication and surface-micromachining technology, giving the student a basic understanding of IC and micromachining processes and the effect of processing choices on device performance. Students learn to use process simulation tools and also fabricate and characterize devices in the laboratory. This lecture part will cover the processing techniques and design methodologies of microfabrication. We will discuss the process modules: lithography, thermal oxidation, diffusion, ion implantation, etching, thin-film deposition, epitaxy, metallization. The second part of the course will cover process simulation, layout design rules, MOS, IC, and MEMS process integration. The laboratory part of the course will provide students opportunities to have hands-on experience to fabricate and characterize a NMOS chip with simple MEMS components.Course ScheduleEE143 – Ali Javey Slide 0-6Introduction to Materials and Processing (1-2 weeks)Photolithography (1 week)Etching (1 week)Oxidation (1 week)Deposition (1 week)Diffusion (1 week)Ion Implantation (1 week)Metallization/CMP (1 week)Simulation/Layout (1 week)Process Integration (1 week)Introduction to Devices (2 weeks)Nanolithography and Nanofabrication (1 week)EE143 – Ali Javey Slide 0-7Laboratory Information• We do our best to limit lab size to 12 people; as a result, your telebears enrollment is not a guarantee of being assigned to a lab.• You MUST send an email to Professor Javey ([email protected]) by Thursday 8pm including the following information:– 1) Full Name– 2) Major– 3) Year (Jr., Sr., Grad student, etc.) 4) Rank list of preferred lab sections in descending order of preference (i.e., 1st choice, 2nd choice…)– 5) List of any lab sections that you CANNOT attend• Failure to send an email may result in you being dropped from the course, even if you are registered on telebears.• Final lab assignment will be sent to you via email. PLEASE ENSURE THAT YOUR EMAIL ADDRESS ON TELEBEARS IS CORRECT, SINCE THIS WILL BE USED FOR OFFICIAL CORRESPONDENCE!!!EE143 – Ali Javey Slide 0-8Lab SafetyWeek of 1/28• Mandatory Lab attendance required • You will have a lab orientation session, and will have to pass a safety quiz before you are officially enrolled in this course.• You MUST attend the lab session to which you are assigned.EE143 – Ali Javey Slide 0-9Course Structure – Lab and Lecture• You learn the theories in class; you practice them in lab• You are going to make:– resistors, diodes, MOS-cap– bipolar transistor, MOS-transistor, …– some MEMS structures, like bimorphs, …• By the end of the semester, you should have learnt– basic lab techniques– how to operate some fabrication equipment– how to characterize the devices you madeEE143 – Ali Javey Slide 0-10The EE143 ChipEE143 – Ali Javey Slide 0-11Lab Cleanliness• only enter the clean room fully gowned– hair net + lab coat + glove + shoe net + safety goggles• do NOT touch chemicals / equipment with bare hands• always handle wafers with tweezers and trays (unless told otherwise)• wash hands before and after entering the lab (why??)– before: so as not to contaminate wafers or equipment– after: avoid chemicals being indigested• 3rd week, GSIs will demonstrate how to clean masks• 4th week, GSIs will demonstrate how to piranha- clean wafersEE143 – Ali Javey Slide 0-12Lab Safety• do NOT enter the lab when GSI aren’t present• know all the emergency exits (ask the GSIs to show you)• know where to find the MSDS– under the whiteboard in characterization room• know where to find the closet water sources, shower, eye wash• ask whenever not clear• do NOT try things out without permission• NO eating, drinking, playing, etc. inside the lab• Things in the lab can be dangerous if not carefully handled. Be sure to respect the chemicals.EE143 – Ali Javey Slide 0-13Chemical Handling• wear protective gear when handling corrosive chemicals– face shield, chemical apron, chemical gloves, respirator if necessary• check glove for
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