Berkeley ELENG C235 - Highly Parallel Fabrication of Nanopatterned Surfaces - D163701

Home> Schools> University of California, Berkeley> Electrical Engineering (ELENG) > ELENG C235> Highly Parallel Fabrication of Nanopatterned Surfaces

Berkeley ELENG C235 - Highly Parallel Fabrication of Nanopatterned Surfaces

School name University of California, Berkeley

Course Eleng C235- Nanoscale Fabrication

Pages 10

Download Save

Unformatted text preview:

Slide 1Slide 2Slide 3Slide 4Slide 5Slide 6Slide 7Slide 8Slide 9Slide 10Highly Parallel Fabrication of Nanopatterned Surfaces with Nanoscale Orthogonal Biofunctionalization Imprint LithographyH. E. Gaubert and W. Frey, Nanotechnology 18 (2007) 135101Devang Parekh3/21/07EE235Devang Parekh EE235OverviewMotivationFabricationResultsConclusionDevang Parekh EE235MotivationNanopatterned surfacesBiosensorsTissue engineering scaffoldsBio-MemsSelf-assembly techniquesPattern parametersPattern defectsLack of dual functionalityE-beam and Ion-beamSerialCost prohibitiveDevang Parekh EE235FabricationQuickTime™ and aTIFF (Uncompressed) decompressorare needed to see this picture.Step and Flash (SFIL) Quartz templateBottom Antireflective Coating (BARC) planarization layerBARC spin-coated 45nmLow-viscosity resistPhotoresist fills templateHarden PR with UV exposureStepM. Stewart, et. al, J. Microlith., Microfab., Microsyst. 4, 011002 (2005)Devang Parekh EE235FabricationO2 etch residual photoresist2nd O2 etch to transfer pattern to BARCEvaporate 3nm of CrEvaporate 17nm of AuLift-offDevang Parekh EE235FabricationO2 plasma remove residual organicsHexadecanethiol (HDT)Polyethylene Glycol-silane (PEG-silane)FibronectinHuman umbilical vein endothelial cells (HUVECs)Devang Parekh EE235ResultsAFM physico-chemical mappingForce is random for untreatedHDT is hydrophobicPEG is less hydrophilic than clean wafernm-resolution of physico-chemical differencesDevang Parekh EE235ResultsDevang Parekh EE235ResultsDevang Parekh EE235ConclusionSoft litho->micro NOBIL->nanoOrthogonal functionalization shownSimple and cheap fabricationPossible extension to glass or polymer

View Full Document

Berkeley ELENG C235 - Highly Parallel Fabrication of Nanopatterned Surfaces

Sign up for free to view:

This document and 3 million+ documents and flashcards
High quality study guides, lecture notes, practice exams
Course Packets handpicked by editors offering a comprehensive review of your courses
Better Grades Guaranteed


School:
Email:
New Password:
Confirm Password:

Berkeley ELENG C235 - Highly Parallel Fabrication of Nanopatterned Surfaces

Sign up for free to view:

Please select your school