ECE5320 Mechatronics Assignment#01: Literature Survey on Sensors Topic: MEMS sensorsOutlineReference listMEMS SENSORSSlide 5LimitationsMEMS AccelerometerAutomotivePrinciple Of Operation: ADXL202ADXL 202: SEM PhotosCircuit DiagramSlide 123-axis accelerometer sensorPressure SensorKP100 Pressure SensorSlide 16Flow SensorsMicronozzles for Gas sensing applicationIndustry StatisticsMarket For Established Product TypesConclusionECE5320 MechatronicsECE5320 MechatronicsAssignment#01: Literature Survey on Assignment#01: Literature Survey on Sensors Sensors Topic: MEMS sensorsTopic: MEMS sensorsPrepared by: Urmila PrakashPrepared by: Urmila PrakashDept. of Electrical and Computer Engineering Dept. of Electrical and Computer Engineering Utah State UniversityUtah State UniversityE:[email protected]:[email protected]/11/200501/14/1901/14/19ECE5320 Mechatronics. AssignmenECE5320 Mechatronics. Assignment#1 Survey on sensors and actuat#1 Survey on sensors and actuatorstors22Outline Outline Reference Reference IntroductionIntroductionLimitationsLimitationsMajor applicationsMajor applicationsIndustry statisticsIndustry statisticsMarket growthMarket growthConclusionConclusion01/14/1901/14/19ECE5320 Mechatronics. AssignmenECE5320 Mechatronics. Assignment#1 Survey on sensors and actuat#1 Survey on sensors and actuatorstors33Reference listReference listwww.sensorsmag.comwww.sensorsmag.comwww.ece.umd.edu/MEMSwww.ece.umd.edu/MEMSwww.memagazine.orgwww.memagazine.orgwww.memstech.comwww.memstech.comwww.embedded.comwww.embedded.com01/14/1901/14/19ECE5320 Mechatronics. AssignmenECE5320 Mechatronics. Assignment#1 Survey on sensors and actuat#1 Survey on sensors and actuatorstors44MEMS SENSORSMEMS SENSORSState-of-the-art microelectromechanical-system sensors State-of-the-art microelectromechanical-system sensors are being used in an ever-increasing array of are being used in an ever-increasing array of applications, including sophisticated guidance systems, applications, including sophisticated guidance systems, antilock-braking systems, and medical instrumentsantilock-braking systems, and medical instruments. . MEMS technology is advancing rapidly, and over the last MEMS technology is advancing rapidly, and over the last 5 years has allowed the construction of many new sensor 5 years has allowed the construction of many new sensor types, including (for example) sensors systems based on types, including (for example) sensors systems based on movable mechanical components, microfluidics, free-movable mechanical components, microfluidics, free-space optics, or electron and ion optics. space optics, or electron and ion optics.01/14/1901/14/19ECE5320 Mechatronics. AssignmenECE5320 Mechatronics. Assignment#1 Survey on sensors and actuat#1 Survey on sensors and actuatorstors55Many involve nanotechnology. These components are Many involve nanotechnology. These components are allowing systems that were once confined to the laboratory allowing systems that were once confined to the laboratory to find new applications as portable diagnostic tools to find new applications as portable diagnostic tools The airbag accelerometer was only the first of many The airbag accelerometer was only the first of many MEMS-based sensors to invade automobiles. Automobiles MEMS-based sensors to invade automobiles. Automobiles also use integrated MEMS sensors to analyze exhaust gas also use integrated MEMS sensors to analyze exhaust gas and measure mass airflow and manifold and fuel pressure. and measure mass airflow and manifold and fuel pressure. Other commercial products include a revolutionary display Other commercial products include a revolutionary display technology from Microvision. This MEMS-based display technology from Microvision. This MEMS-based display enables viewing full-size web pages and e-mail enables viewing full-size web pages and e-mail attachments on a small cell phone. It will soon enable digital attachments on a small cell phone. It will soon enable digital camera owners to see images at print resolutions through camera owners to see images at print resolutions through the viewfinderthe viewfinder01/14/1901/14/19ECE5320 Mechatronics. AssignmenECE5320 Mechatronics. Assignment#1 Survey on sensors and actuat#1 Survey on sensors and actuatorstors66LimitationsLimitationsMEMS sensors, like almost all electronic devices, do not MEMS sensors, like almost all electronic devices, do not exhibit ideal behaviour. exhibit ideal behaviour. While most designers have learned how to handle the While most designers have learned how to handle the non-ideal behaviour of op-amps and transistors, few non-ideal behaviour of op-amps and transistors, few have learned the design techniques used to compensate have learned the design techniques used to compensate for non-ideal MEMS behaviour.for non-ideal MEMS behaviour. In most cases, this type of information is not available in In most cases, this type of information is not available in textbooks or courses, as the technology is quite new. So textbooks or courses, as the technology is quite new. So generally designers must get this type of information generally designers must get this type of information from the MEMS manufacturer. from the MEMS manufacturer. Analog Devices, for example, maintains a web site with Analog Devices, for example, maintains a web site with design tools, reference designs, and dozens of design tools, reference designs, and dozens of application notes specific to its MEMS accelerometers to application notes specific to its MEMS accelerometers to ease the users work. ease the users work.01/14/1901/14/19ECE5320 Mechatronics. AssignmenECE5320 Mechatronics. Assignment#1 Survey on sensors and actuat#1 Survey on sensors and actuatorstors77MEMS AccelerometerMEMS AccelerometerApplication: Application: AutomotiveAutomotiveAerospaceAerospaceArmyArmy01/14/1901/14/19ECE5320 Mechatronics. AssignmenECE5320 Mechatronics. Assignment#1 Survey on sensors and actuat#1 Survey on sensors and actuatorstors88AutomotiveAutomotive01/14/1901/14/19ECE5320 Mechatronics. AssignmenECE5320 Mechatronics. Assignment#1 Survey on sensors and actuat#1 Survey on sensors and actuatorstors99Principle Of Principle Of Operation: ADXL202Operation: ADXL202Sensor at rest, responding to Sensor at rest, responding to applied applied accelerationaccelerationDimensionsDimensions01/14/1901/14/19ECE5320 Mechatronics.
View Full Document
Unlocking...