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Thermal ActuatorsECE 5320 Mechatronics Assignment 1: Literature Survey on Sensors and ActuatorsOutlineReferencesTo Explore FurtherWhat is a Thermal ActuatorWhat is MEMSMore on MEMSSlide 9Some MEMS examplesThe beauty of MEMSThe Military uses MEMS for gathering informationHow is MEMS createdMore on the creation of MEMSMEMS as smart microsystemsHow do Thermal Actuators fit inSlide 17Slide 18More on how Thermal Actuators workThermal actuatorsMEMS in opticsOpticsMicro-optical systemsSlide 24Thermal ActuatorsECE 5320 MechatronicsAssignment 1: Literature Survey on Sensors and Actuators Topic: Thermal ActuatorsPrepared by: McLain L. CoxDept. of Electrical and Computer EngineeringUtah State University9 March 2004Outline●Reference List●To Explore Further●Intro on MEMS●How MEMS is useful●How MEMS is built●Thermal Actuators●Use in OpticsReferences●www.rl.af.mildiv/IFB/techtrans/datasheets/MEMS.html●www.imec.be/wwwinter/research/en/MEMS.shtml●www.rl.af.mildiv/IFB/techtrans/datasheets/MEMS.html●www.mems-exchange.org/MEMS/what-is.htm●www-g.eng.cam.ac.uk/edm/research/mems/mems.html●www.swri.edu/3pubs/IRD2000/15-9158.htm●www.sfu.ca/adm/heatuator.html●www.swri.edu/3pubs/IRD2000/15-9158.htm●www.memx.orgTo Explore Further●Not much is out there on Thermal Actuators, but it is most commonly associated with MEMS. To find more information, look up as much as possible on MEMS. Thermal Actuators should be included there.What is a Thermal Actuator●Thermal actuators are a part of the newest rage, MEMS●They are tiny actuators that move according to the heat that is given to themWhat is MEMS●Micro●Electro-●Mechanical●System●Source www.rl.af.mildiv/IFB/techtrans/datasheets/MEMS.htmlMore on MEMS●MEMS are on a micrometer scale●They are proving very useful to nanotechnology●They consist of electrical and non-electrical components i.e. Mechanical, biochemical, and Optical●Source www.imec.be/wwwinter/research/en/MEMS.shtmlMore on MEMS●compact information products which sense, process, store, and communicate information●enables the integration of digital, analog/RF, mechanical, and fluidic technologies all on a single silicon substrate in order to create micro-structures for sensing, actuating, control and data storage●Source www.rl.af.mildiv/IFB/techtrans/datasheets/MEMS.htmlSome MEMS examples●personal digital assistants●smart munitions and decoys●wireless communicators●distributed sensor systems●inkjet print heads●pressure sensors●accelerometers in airbags●biochemical sensors●Sources www.imec.be/wwwinter/research/en/MEMS.shtml,www.rl.af.mildiv/IFB/techtrans/datasheets/MEMS.htmlThe beauty of MEMS●MEMS share the attributes of being size, weight, and cost driven; incorporate both digital and analog/RF functions; and may involve a limited amount of precision electro-mechanical assembly●Source www.rl.af.mildiv/IFB/techtrans/datasheets/MEMS.htmlThe Military uses MEMS for gathering information●Information exploitation is accomplished through interconnecting data processing, displays, batteries, mass storage, and input/output devices using advance telemetry interfaces. This class of system represents a large fraction of future DoD and commercial products. The integration of microdevices of a non-transistor nature in a monolithic system are now being called integrated microdevices●Source www.rl.af.mildiv/IFB/techtrans/datasheets/MEMS.htmlHow is MEMS created●fabricated by surface micromachining●built on same substrate as the chip●polycrystalline silicon is replaced by poly-SiGe●Source www.imec.be/wwwinter/research/en/MEMS.shtmlMore on the creation of MEMS●While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical components are fabricated using compatible "micromachining" processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices●Source http://www.mems-exchange.org/MEMS/what-is.htmlMEMS as smart microsystems●Microelectronic integrated circuits can be thought of as the "brains" of a system and MEMS augments this decision-making capability with "eyes" and "arms", to allow microsystems to sense and control the environment●Sensors gather information from the environment through measuring mechanical, thermal, biological, chemical, optical, and magnetic phenomena●The electronics process the information derived from the sensors and through some decision making capability direct the actuators to respond by moving, positioning, regulating, pumping, and filtering, thereby controlling the environment for some desired outcome or purpose●Source http://www.mems-exchange.org/MEMS/what-is.htmlHow do Thermal Actuators fit in●One component of MEMS is Thermal Actuators●This one moves the bottom panel as it is heated and cooled.●Source www-g.eng.cam.ac.uk/edm/research/mems/mems.htmlThermal Actuators•This shows a horizontal thermal actuator at work. It is similar to the actuator in the previous slide.•Source http://www.swri.edu/3pubs/IRD2000/15-9158.htm9158vid2.movThermal Actuators•Here is a vertical one. Instead of moving horizontally, it moves vertically.•Source http://www.swri.edu/3pubs/IRD2000/15-9158.htmhorizon tal.movMore on how Thermal Actuators work●When a voltage is applied to the terminals, current flows through the device. However, because of the different widths, the current density is unequal in the two arms. This leads to a different rate of Joule heating in the two arms, and thus to different amounts of thermal expansion. The thin arm is often referred to as the hot arm, and the wide arm is often referred to as the cold arm.●Source http://www.sfu.ca/adm/heatuator.htmlThermal actuators●Vertical actuators like this, are used in applications, like closing a switch. ●Other applications are optics. This figure shows a vertical thermal actuator with integrated micromirror. Application of a current to the actuator arm produces vertical motion of the mirror, which can either reflect an optical beam or allow it to be transmitted.●Source http://www.swri.edu/3pubs/IRD2000/15-9158.htmMEMS in optics●he greatest promise of microelectromechanical systems (MEMS) lies in the ability to produce mechanical motion on a small scale. Such devices are typically low power and fast, taking advantage of such microscale phenomenon


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