ECE5320 Mechatronics Assignment#01: Literature Survey on Sensors and Actuators Topic: Electrostatic ActuatorElectrostatic Actuator OutlineReferencesFurther ReadingSlide 5About MEMSWhat is MEMS? (From ITC INTERNATIONAL TEST CONFERENCE – IEEE)Electrostatic ActuatorSlide 9Slide 10Slide 11Slide 12Slide 13Slide 14Slide 15Slide 16Slide 17Slide 18Slide 19Slide 20Slide 21Slide 22Slide 23Slide 24Slide 25Slide 26Slide 27Slide 28Slide 29Slide 30Slide 31Slide 32Slide 33Slide 34Slide 35Limitations & IssuesSlide 37Slide 38Slide 39Slide 40Slide 41Slide 42Slide 43Slide 44Vendor InformationSlide 46ECE5320 MechatronicsAssignment#01: Assignment#01: Literature Survey on Sensors and Actuators Literature Survey on Sensors and Actuators Topic: Electrostatic ActuatorPrepared by: Prasad SubramanianDept. of Electrical and Computer Engineering Utah State University3/09/200601/13/19Slide-2Electrostatic Actuator Outline –Reference list–Further Reading–About MEMS–Principle of operation of Electrostatic Actuator–MEMS Electrostatic Actuator–Importance of Electrostatic MEMS Actuator–Basic working principle illustrated–Applications : Electrostatic Comb Drives–Limitations–Vendor Information01/13/19Slide-3References•http://www-bsac.eecs.berkeley.edu/projects/ee245/Lectures/lecturepdfs/Lecture10.Handouts.pdf •http://itcprogramdev.org/itc2003proc/Papers/PDFs/0027_1c.pdf •http://arri.uta.edu/acs/jmireles/MEMSclass/lecture4.pdf01/13/19Slide-4Further Reading•Micro Electrostatic Actuators In Dual-Stage Disk Drives With High Track Density - Y. Tang, S.X. Chen and T. S. Low - IEEE TRANSACTIONS ON MAGNETICS,•Electrostatic Linear Microactuator Mechanism for Focusing a CCD Camera Akihiro Koga, Koichi Suzumori, Member, IEEE, Hajime Sudo, Shoichi Iikura, and Masanobu Kimura - JOURNAL OF LIGHTWAVE TECHNOLOGY,•Electrostatic Actuator with Novel Shaped Cantilever - Yoshihiko Hirai, Yoshinari Marushima, Shinnosuke Soda, Donghao Jin, Hiroaki Kawata, Kouji Inoue * and Yoshio Tanaka•MEMS Electrostatic Actuators for Optical Switching Applications - John D. Grade and Hal Jerman•New MOEMS-Switch Device with Electrostatic Actuator - E. Thielicke, E. Obermeier - IEEE 2002•http://www.sandia.gov/mstc/technologies/micromachines/tech-info/bibliography/biblog_general.html•Related Links in MEMS: http://www.sandia.gov/mstc/technologies/micromachines/links/index.html•http://www.mems-exchange.org/01/13/19Slide-501/13/19Slide-6About MEMS•Microelectromechanical Systems (MEMS) have gained acceptance as viable products for many commercial and government applications. MEMS are currently being used as displays for digital projection systems, sensors for airbag deployment systems, inkjet print head systems, and optical routers. This paper will discuss current and future MEMS applications.(from ITC INTERNATIONAL TEST CONFERENCE – IEEE)01/13/19Slide-7What is MEMS? (From ITC INTERNATIONAL TEST CONFERENCE – IEEE)•MEMS are typically defined as microscopic devices designed, processed, and used to interact or produce changes within a local environment.•A mechanical, electrical, or chemical stimulus can be used to create a mechanical, electrical, or chemical response in a local environment. These smaller, more sophisticated devices that think, act, sense, and communicate are replacing their bulk counterparts in many traditional applications.01/13/19Slide-8Electrostatic Actuator•Electrostatic actuators operate using an applied electric field between fixed and moveable structures. •One structure is fixed to the substrate and biased producing electric fields along the edges of the structure. •The fixed components are typically the only biased structure in the device. •This structure is typically a multi-fingered component where electric fields are present along the comb fingers.01/13/19Slide-901/13/19Slide-1001/13/19Slide-1101/13/19Slide-1201/13/19Slide-1301/13/19Slide-1401/13/19Slide-1501/13/19Slide-1601/13/19Slide-1701/13/19Slide-1801/13/19Slide-1901/13/19Slide-2001/13/19Slide-2101/13/19Slide-2201/13/19Slide-2301/13/19Slide-2401/13/19Slide-2501/13/19Slide-2601/13/19Slide-2701/13/19Slide-2801/13/19Slide-2901/13/19Slide-3001/13/19Slide-3101/13/19Slide-3201/13/19Slide-3301/13/19Slide-3401/13/19Slide-3501/13/19Slide-36Limitations & Issues01/13/19Slide-3701/13/19Slide-3801/13/19Slide-3901/13/19Slide-4001/13/19Slide-4101/13/19Slide-4201/13/19Slide-4301/13/19Slide-44Comb Drives and Springs Courtesy: http://mems.sandia.gov/scripts/images.asp Although fabricated in the 5-layer process, the resulting structures are not far off the wafer substrate. Powerful magnification is necessary to see these comb drives and springs.01/13/19Slide-45Vendor Information•http://www.memx.com/technology.htm •http://www.sandia.gov/mstc/technologies/micromachines/tech-info/overview/index.html01/13/19Slide-46THANKS for Viewing- Prasad
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