ECE5320 Mechatronics Assignment#01: Literature Survey on Sensors and Actuators Topic: MICROCANTILEVERS (Sensors)OutlineReference listTo explore further (survival pointers of web references etc)Cantilevers as SensorsWorking PrincipleSlide 8MicrocantileversSlide 10Microcantilever DeflectionIllustration of ‘Optical Lever Method’ commonly used to measure the Microcantilever DeflectionSlide 13Slide 14Slide 15Slide 16Slide 17SpecificationsLimitationsResearch Areas and TrendsECE5320 MechatronicsAssignment#01: Literature Survey on Sensors and Actuators Assignment#01: Literature Survey on Sensors and Actuators Topic: MICROCANTILEVERS(Sensors)Prepared by:Deepti R PatlollaDept. of Electrical and Computer Engineering Utah State UniversityE: ; T: (435)797-; F: (435)797-3054 (ECE Dept.)02/24/200701/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-2Outline •Reference list•To probe further•Major applications•Basic working principle illustrated•A typical sample configuration in application (application notes)•Major specifications•Limitations•And many more relevant issues in applications (such as, how to choose, cost information, where to buy etc.)01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-3Reference list•http://www.ornl.gov/sci/engineering_science_technology/sms/Hardy%20Fact%20Sheets/CMOS%20Centilever.pdf•http://www.nanoparticle.com/publicationfiles/JRheology_2002_46_891.pdf•http://ieeexplore.ieee.org/iel5/9154/29060/01309606.pdf•http://www.engineering.usu.edu/bie/bio/research/files/ibe_cantilever_presentation.pdf•http://www.mic.dtu.dk/Research/NSE/Nanoprobes/Introduction.aspx•http://www.ornl.gov/info/ornlreview/rev29_3/text/biosens.htm01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-4To explore further (survival pointers of web references etc) •http://www.sciencemag.org/cgi/reprint/sci;311/5767/1592.pdf•http://www.mnl.ornl.gov/Publications/Dutta-2004.pdf•http://www.mnl.ornl.gov/Publications/Lavrik-2004b.pdf•http://www.mnl.ornl.gov/publications.html01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-5 •BioSensing•Drug Discovery•Chemical Detection•Thermal Detection•Vibration monitors•Infrared and UV radiationApplications of Microcantilevers01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-6Cantilevers as Sensors•Cantilevers-based sensor systems use MEMS fabrication and custom CMOS readout. They can be readily fabricated on silicon wafers and other materials. • Cantilever sensors can be operated in various environments, such as vacuum, air, or liquids.01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-7Working Principle•Molecular adsorption on cantilever surface results in changes in resonance response such as resonance frequency, amplitude, phase and Q-factor due to mass loading. When the molecular adsorption is confined to a single side, the cantilever undergoes bending due to changes in surface stress (surface free energy). The motion of the cantilever can be sensitively detected using a number of techniques such as optical beam deflection or piezoresistance method. •The bending equation is given by Stoney’s Equation: •t: thickness of the beam; E: Young’s Modulus; v: Poisson’s Ratio01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-8Advantages of the cantilever sensor platform:•Miniature size•Multiple analyte detection using single platform •Extreme high sensitivity •Excellent selectivity due to arrayed readout•Operation in air and under solution•Common mode rejection for noise cancellation. •Wide dynamic range•Can be coupled to RF communications •Low-power electronics, power management circuitry, and electrical self testing01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-9Microcantilevers•Microscopic sensors spanning the width of a human hair were first developed by the researchers at the Department of Energy's (DOE) Oak Ridge National Laboratory (ORNL). •These can detect and measure relative humidity, temperature, pressure, flow, viscosity, sound, natural gas, mercury vapor, ultraviolet and infrared radiation and DNA sequences and proteins.01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-10•The microcantilever is usually constructed of a silicon plank 100 micrometers (mm) long, 30 mm wide, and 3 to 4 mm thick approximately. •When molecules are added to its surface, the extent to which the plank bends can be measured accurately by bouncing a light beam off the surface and measuring the extent to which the light beam is deflected. The vibrational frequency can be induced by piezoelectric transducers and measured with the same laser beam that measured the deflection because it generates an alternating current in the detector.01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-11Microcantilever DeflectionMicrocantilever deflection can be caused due to•Change in mass•Surface stress changes•Gibb’s free energyDirection of cantilever deflection can be downward due to mass increase or expansion at the cantilever surface or be upward due to attraction and contraction at the cantilever surface.01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-12Illustration of ‘Optical Lever Method’ commonly used to measure the Microcantilever Deflection01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-13SOME APPLICATION AREASRheological Measurements using MicrocantileversAtomic Force Microscope (AFM) microcantilevers are used as sensors for gas detection, mass measurement, temperature measurement, spectroscopy, and calorimetry.01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-14 Microcantilever as a Biosensor•Biosensors are sensors in which biomolecular interactions are used as sensing reactions. Biomolecular interactions, when combined with a microcantilever platform, can produce an extremely powerful biosensing design. •The deflection of the microcantilever depends on the distribution and number of target molecules adsorbed on the surface.01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-15Uncooled Microcantilever Thermal
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