ECE5320 Mechatronics Assignment#01: Literature Survey on Sensors and Actuators Topic: Micro-Electro-Mechanical Systems (MEMS)OutlineOutline (cont)Reference listTo explore further (survival pointers of web references etc)What Are MEMS Sensors?What Can MEMS Measure?Major applicationsAdvantages of MEMSBasic Working PrincipleA typical sample configuration in application, Figure 1Explanation of Figure 1InterfacesMajor specificationsMajor Specifications (cont)LimitationsHow to chooseWhere to buyCostDevelopment HintsECE5320 MechatronicsAssignment#01: Literature Survey on Sensors and Actuators Assignment#01: Literature Survey on Sensors and Actuators Topic: Micro-Electro-Mechanical Systems (MEMS)Prepared by:Nate HigbeeDept. of Electrical and Computer Engineering Utah State University3/10/200601/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-2Outline –Reference list–To probe further–What are MEMS Sensors–What can MEMS Measure–Interfaces–Major applications–Basic working principle illustrated–A typical sample configuration in application (application notes)01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-3Outline (cont)–Major specifications–Limitations–And many more relevant issues in applications (such as, how to choose, cost information, where to buy etc.)–Development hints01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-4Reference list•www.analog.com•www.memsnet.org/mems/applications.html•www.flow3d.com/appl/mems.htm •www.memscap.com/aboutmems.html01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-5To explore further (survival pointers of web references etc) •Google Search•Check www.analog.com01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-6What Are MEMS Sensors?•Micro-Electro-Mechanical System.•Small Robust Sensors, integrated with Advanced Signal Conditioning Circuitry.•Single Integrated Circuit.01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-7What Can MEMS Measure?•Position•Motion•Tilt•Shock•Vibration01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-8Major applications •Airbag Sensors•Robotics•Tire Pressure Sensor•Avionics•Fuel Sensors•Engine and Brake Force Control•Noise Cancellation01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-9Advantages of MEMS•Can be fabricated in large numbers•Cost effective•Can be directly incorporated into an IC and combined with other circuitry/technologies01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-10Basic Working Principle•Differential Capacitance•A mass is suspended above the surface of the chip and as it moves it changes capacitance between itself and other stationary parts.01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-11A typical sample configuration in application, Figure 1Figure downloaded from www.analog.com01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-12Explanation of Figure 1•Cx, Cy, and Cz are used to low pass filter the analog outputs of the sensor. •By choosing the proper capacitance you can place the pole wherever you like.•Cdc is a bypass capacitor used to help regulate the voltage VCC.01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-13Interfaces•Analog Output•SPI Bus•Pulse Width Modulation01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-14Major specifications•# of axes•Range•Sensitivity•Sensitivity Accuracy•Output Type•Max Bandwidth•Noise Density•Voltage Supply01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-15Major Specifications (cont)•Supply Current•Temperature Range•Package•Price•RoHS Compliancy01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-16Limitations•Accuracy over time – integrating acceleration twice to calculate position will introduce massive amounts of error into the measurement.•Design process can be very costly – redesigning chips is very expensive.01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-17How to choose•Consider required specifications for your design•Consider possible choices•Choose the part the fits your needs01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-18Where to buy•www.analog.com•www.digikey.com•www.mouser.com•Any large electronics distributor01/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-19Cost•Varies with Quantity•$3 - $3001/14/19ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuatorsSlide-20Development Hints•Many companies offer development boards that can ease your evaluation/experimentation process.•Many companies offer design tools as
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