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UCD EEC 116 - ELECTROMIGRATION

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1ELECTROMIGRATIONEEC116,Spring2008, B.Baas2ElectromigrationLimits dc-current to 1 mA/μm• OpenwirefailureSource: Digital Integrated Circuits, 2nd ©2EEC116,Spring2008, B.Baas3Electromigration• OpencontactplugfailureSource: Digital Integrated Circuits, 2nd ©EEC116,Spring2008, B.Baas4Electromigration• Hillockformation•ShortcircuitfailureSource: CSL, METU3EEC116,Spring2008, B.Baas5Electromigration• HillocksformedinaCulineduringelectro‐migrationtestSource: Notre


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UCD EEC 116 - ELECTROMIGRATION

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