EMPLOYEE HANDBOOK Article EH-1 Spartan Semiconductor Services, Inc. EH-1-1 EH-I: GREENSHEET Materials Engineering/Electrical Engineering 129 FALL 2003 Congratulations! You have just joined Spartan Semiconductor Services, Inc. Our company makes integrated circuits and provides thin film materials processing for a variety of industries and devices. New employees will be assigned to a team and expected to work hard, learn fast, and contribute to their team's and the company’s success. This document will provide you with an initial introduction to the company, and let you know what we expect of you. Company Description and Objectives This is a laboratory-based course on fabrication of integrated circuits. The lecture and lab will cover basic semiconductor processes used in fabrication of integrated circuits such as surface preparation, oxidation, diffusion, photolithography, etching and thin film deposition. Function and layout of transistors and passive devices will be explored, as well as evaluation of device parameters. This is a team-oriented, interdisciplinary course enrolling EE, MatE, ChE, ME, Chemistry and Physics majors. Each student brings a different background to the course. The laboratory is the central theme of the course. This course will require a considerable amount of work outside of regularly scheduled class time so be prepared to invest a lot of time. The objectives of the course are to introduce the student to the technical aspects of semiconductor device processing, as well as to present by experience the benefits of working in a team. Prior Experience Required MatE 129 requires MatE 153 with grade of C or better (MatE/EE majors), or MatE 25 (other Eng majors) or consent of instructors. Company Hours Activity Section Day Time Lab Manager Location Lecture 1 Tues/ Thursday 1630 - 1720 ALL E343 Lab 2 Tues 1330 - 1620 Dr. David W. Parent E311 3 Tues 18 :30-21 :20 Dr. Emily Allen E311 There will be additional open laboratory hours every week. The schedule will be distributed in class and posted on the lab door as soon as it is available.EH-1: Greensheet Spartan Semiconductor Services, Inc. EH-1-2 Company Officers Chairman Dr. David W. Parent ENGR-355 (408) 924-3963 [email protected] OH: M-F 10-11am Chief Executive Officer Dr. Emily Allen ENGR-385 Work (408) 924-4010 OH: M/T/Th 1030-1200; W 1330-1500 [email protected] Chief Fiscal Officer Dr. Greg Young ENGR-385 Work (408) 924-3945 [email protected] President Neil Peters (408) 924-3967 cell (408) 892-3808 [email protected] Office Hours: TBA Textbooks Employees must purchase the following textbooks and lab materials: S. Wolf & R.N. Tauber, Silicon Processing for the VLSI Era: Volume 1- Process Technology, 2nd edition, Lattice Press, 2000. Available at Spartan Bookstore Computational Lab Book and 3-Ring Binder. Available at Spartan Bookstore. Spartan Semiconductor Employee Handbook. Available at Maple Press, 481 E San Carlos Street, San Jose; 408-297-1001 Additional References Available on reserve at the Clark Library: 1. Geiger, Allen and Strader, VLSI Design Techniques for Analog and Digital Circuits, McGraw-Hill, 1990. 2. Ghandhi, S.K. VLSI Fabrication Principles, Wiley 1983. 3. Sze, VLSI Technology, McGraw-Hill, 1998.EH-1: Greensheet Spartan Semiconductor Services, Inc. EH-1-3 4. Lee, Fundamentals of Microelectronics Processing, McGraw-Hill, 1990. Employee Resources Spartan Semiconductor Employee Handbook The Employee Handbook contains most of the documents needed to perform the fabrication tasks for the company. It also contains example homework assignments from previous semesters. Please place the handbook materials into a three-ring binder and bring it with you to class and lab every week. You will receive additional material during the semester, which you can add to the binder. The handbook is divided into five sections. Employee Handbook This section contains administrative documents such as the Greensheet, lab schedules, lecture schedules, etc. Continuing Education This section contains some of the lecture notes used in class. It also contains supplementary reading materials not covered in the textbook. Process Handbook This section contains the details of fabrication of devices which will be done in the lab. The “process traveler”, which details all of the steps necessary for the PMOS transistor process, is also included. The traveler is the most important document in the handbook - without it you cannot accomplish your work. It will also be helpful to read ahead the relevant parts of the process handbook each week. Problem Solving Exercises This section contains selected homework and in-class problem solving exercises used during Spring 1996 and 1997. You may use these as practice problems. Solutions of most of the homework problems are also included. Executive Memos This section contains memos from the company officers which may detail important things you need to know which were not covered anywhere else. You will receive additional executive memos during the semester and should keep them in your three-ring binder. Feel free to issue your own memos to your team-mates or to the company officers, especially if you have suggestions about process changes or management policies.EH-1: Greensheet Spartan Semiconductor Services, Inc. EH-1-4 Laboratory Cleanroom coats will be distributed to each employee at the first Lab Section Meeting and stored in the Lab for continued use. Protective eyewear and protective gloves will be available and must be worn at all times while in the laboratory. Long pants and close-toed shoes must be worn in the laboratory (no sandals). No food and drinks of any kind (including chewing gum) are allowed in the laboratory. Each employee must obtain a laboratory notebook from the Spartan Bookstore and keep a record of all laboratory activities in it. These notebooks will be checked periodically by the company officers. See the Employee Handbook for ideas on what to put into your laboratory notebook. Employee Responsibilities Each individual employee is responsible for learning the material discussed in class and in the laboratory. There will be homework assignments due in class which must be turned in individually. You may work with your colleagues in solving problems, but your homework must be uniquely your own. The final examination and final report will be an individual effort.