EE 245: Introduction to MEMSLecture 11: Bulk MicromachiningCTN 10/1/09Copyright © 2009 Regents of the University of California• Announcements:• Lecture schedule for the next 4 weeks:• Midterm Exam:ª Evening of Th, Oct. 29? 7, 10 ת Class Period of Tu, Nov. 3? 7, ll 9ª Tu, Oct.27 ? 8 ו ----------------------------------65Lecture3:30-5Moffitt43Midterm3:30-5MoffittNov. 2Lecture5-6:30241 Cory3029Lecture3:30-5Moffitt282726Discuss3:30-5Moffitt2322Lecture3:30-5Moffitt2120Lecture3:30-5Moffitt19Lecture5-6:30241 Cory1615Discuss3:30-5Moffitt141312Lecture5-6:30241 Cory98Discuss3:30-5Moffitt76Lecture3:30-5MoffittOct. 5Lecture5-6:30241 CoryFridayThursdayWednesdayTuesdayMonday• Today:• Reading: Senturia Chpt. 3, Jaeger Chpt. 11, Handout: “Surface Micromachining for Microelectromechanical Systems”• Lecture Topics:ª Polysilicon surface micromachiningª Stictionª Residual stressª Topography issuesª Nickel metal surface micromachiningª 3D “pop-up” MEMSª Foundry MEMS: the “MUMPS” processª The Sandia SUMMIT process• ----------------------------------• Reading: Senturia Chpt. 3, Jaeger Chpt. 11, Handouts: “Bulk Micromachining of Silicon”• Lecture Topics:ª Bulk Micromachiningª Anisotropic Etching of Siliconª Boron-Doped Etch Stopª Electrochemical Etch Stopª Isotropic Etching of Siliconª Deep Reactive Ion Etching (DRIE)• ----------------------------------• Finish up surface micromachining Module 5• Start through bulk micromachining Module 6EE 245: Introduction to MEMSLecture 11: Bulk MicromachiningCTN 10/1/09Copyright © 2009 Regents of the University of
View Full Document
Unlocking...