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A 500MHz Low Phase-Noise AlN-on-Silicon Reference Oscillator



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IEEE 2007 Custom Intergrated Circuits Conference CICC A 500MHz Low Phase Noise AlN on Silicon Reference Oscillator Hossein Miri Lavasani Reza Abdolvand and Farrokh Ayazi School of Electrical and Computer Engineering Georgia Institute of Technology Atlanta GA 30332 Abstract This paper presents a 496MHz low phase noise reference oscillator using a high Q lateral mode AlN on Si micromechanical resonator that does not require DC voltage for operation The sustaining amplifier consists of an inductorless high gain CMOS transimpedance amplifier TIA that is optimized for low phase noise The resonator is designed to have a high quality factor in air Q 3800 with low motional impedance The measured phase noise at 1kHz offset is 92dBc Hz with phase noise floor below 147dBc Hz exceeding GSM phase noise requirement by 2dB and 28dB respectively I INTRODUCTION Frequency reference oscillator is a critical component of any radio transceiver Currently most reference oscillators are based on quartz crystals Although quartz oscillators exhibit superior stability and phase noise performance their frequency limitation 200MHz reduces the performance of multi mode RF transceivers because of the increase in the upconversion ratio for the synthesizers Moreover the inherent incompatibility of quartz with IC fabrication prevents size reduction in transceivers On the other hand Silicon integrated micromechanical oscillators offer small form factor higher frequency operation and integration with electronics 1 3 Prior work on low phase noise silicon micromechanical reference oscillators are based on capacitive MEMS resonators with native frequencies in the VHF range 3 4 The motional impedance associated with highfrequency 100MHz capacitive resonators is usually large 10k In addition capacitive resonator need to be operated in vacuum and require a DC polarization voltage that is typically beyond what is available in standard IC processes 5V This complicates the realization of low power lowphase



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