Electron microscopyElectron Microscopy Marketing surveyIntroduction to Scanning Electron MicroscopyAdministrative stuffAdministrative stuff continuedTentative grading planHeads-up: Course evaluationOffice hoursPlan of AttackSEM LocationsLecture 1Relative sizes of thingsOrder of MagnitudeSlide 14Slide 15Leo resolution is about 10 nmSlide 17Carbon nano-tube on AFM Tip (note vibration of end) Gerton GroupCeO2-coated boron nano-particles Scott Anderson GroupSlide 20Slide 21Advantages of SEMRadiolaria (Brazenly stolen from Wikipedia)Radiolarian: optical microscopeRadiolarian: confocal microscopeRadiolarian: SEMCheek cells: Optical microscopeCheek cells: confocal microscopeCheek cells: Atomic Force MicroscopeCheek cells: SEMGold nanoparticlesDuctile iron: Secondary electron detectorDuctile iron: Backscatter detectorX-ray spectrum of clayClay sample and distribution of elements across imageOverview of electron microscopyOverview of Scanning Electron MicroscopySlide 38Electron Probe X-Ray MicroanalysisSlide 40Electron microscopyElectron MicroscopyMarketing survey•What is your background? (major/research interest/advisor)•What is your experience in electron microscopy?•What do you expect to learn from this class?•Do you have samples you are interested in analyzing? How? What do you want to learn?Introduction to Scanning Electron MicroscopyMatt DeLong329 JFB 581-7462 [email protected] Harvey2110 MEB [email protected] Polson192 INSCC [email protected]://www.physics.utah.edu/Classes-fall.htmlAdministrative stuff•3-credits: lectures, HW, exams and labs•4-credit: same as 3-credit but add project. (Like compare images of your samples from several microscopes with many detectors, voltages…) Have you research funds to pay for machine time?•Lab schedule: T,W,H 1000-1300; 1400-1700. Can all fit in one of these? F 0800 – 1100?Administrative stuff continued•This course is going to be a lot of work. You are reminded of a quote from Tom Lehrer: “Life is like a sewer: what you get out of it depends on what you put into it.”•“Are you here to get a degree or to get an education?”•The instructors will be available for virtually unlimited assistance to dedicated students.•You are encouraged to bring your own samples from your own research to image.Tentative grading plan•Labs: 50 points each (9 planned)•Midterm: 100 points•Lab midterm: 100 points•Homework: will average approximately 15 points per week•Quizzes: 10 points (5-10 at beginning of lecture)•Final: 150 points•Lab final: 100 points•Quizzes and exams will be closed book. You may bring a 3x5 card to quizzes and 8.5x11 “cheat sheet” to exams, specifically including lab exams.Heads-up: Course evaluation“Now I have to admit, and I mean no offense by this, but it took me a little while to get used to Matt. He’s just pretty intense and fairly intimidating. But once I got past that I think Matt does a great job. If you don’t ask enough questions he’ll beat them out of you. If he catches you slacking or not paying attention he’ll call you on it and make you shape up. While this makes it quite intimidating … I think it made for a favorable result. Namely being that Matt forces [a] healthy amount of dialogue and expects feedback from his students. So learning doesn’t become a passive activity. Because of the nature of the course I think this was helpful. “Office hours•Matt DeLong JFB 329 0800 – 1000 Wednesdays and Fridays?•Randy Polson INSCC 153 0800 – 1000 Tuesdays and Thursdays? This will be an open time for individual assistance on the microscopes. Moves to MEB 1555B in November.Plan of Attack•Monday lecture (50 min): Concepts in electron microscopy. Tied to text. Typically includes short quiz on assigned readings.•Monday “Lab Lecture” (30 min): Discussion of what we will do in lab this week.•Tuesday – Thursday: 2-3-hour labs with 2-3 students per lab. 1000 – 1300, 1400 – 1700?•Friday: post mortem discussion of what you learned in the lab; questions about what you didn’t understand; more concepts.SEM Locations•Physics Leo: INSCC 153 1-5859•College of Science FEI HR-SEM: INSCC 153 1-5859•College of Engineering FEI ESEM: MEB 1555B 1-5676•Materials Science Hitachi: 133 EMRO 1-5303Lecture 1•Neat stuff you can see with an SEM•Advantages of an SEM•Overview of electron microscopy•Introduction to concepts of vacuumRelative sizes of things•100 m size of person•10-2 m (1 cm) buttons on cell phones•10-4 m limit of human vision, hair diameter •10-6 m (1 micron) biological cells, limit of optical microscopy•10-7 m current semiconductor technology•10-8 m diameter of carbon nanotubes, gold nanoparticles and nanorods•10-9 m (1 nm) nanoparticles; limit of SEM•10-10 (1 Angstrom) m atomsOrder of Magnitude•Term is often grossly misused, including by physicists, who should know better!•The order of magnitude of a number is, intuitively speaking, the number of powers of 10 contained in the number. (Wikipedia)•An order of magnitude estimate of a variable whose precise value is unknown is an estimate rounded to the nearest power of ten.Silicon nanowires Mark Miller group: LeoSilicon nanowiresMark Miller group; LeoLeo resolution is about 10 nmGold on carbon, 108kX Marker bar is 100 nmGold nano-particles tethered to crescentsShumaker-Parry groupFEI NovaNanoCarbon nano-tube on AFM Tip (note vibration of end)Gerton GroupFEI NovaNanoCeO2-coated boron nano-particlesScott Anderson GroupFEI NovaNano STEMOpal thin film (silica spheres). LeoOak leaf, 1kXUtah Neural Array Solzbacher group. Note depth of field. Arraay is 4.5 mm square!Advantages of SEM•Sub-nanometer resolution –Optical microscopes limited to 200 - 300 nm.•Huge dynamic range–15X to 1,000,000X meaningful•Size measurements: nm – mm scale.•Optional analytical techniques–Spatial mapping of elements–Phase ID, grain size and orientation distribution–Qualitative and quantitative (2-10% accurate)•E-beam lithography option–10 nm feature sizeRadiolaria(Brazenly stolen from Wikipedia)•Radiolarians (also radiolaria) are amoeboid protozoa that produce intricate mineral skeletons, typically with a central capsule dividing the cell into inner and outer portions, called endoplasm and ectoplasm. They are found as zooplankton throughout the ocean, and because of their rapid turn-over of species, their tests are