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UMD ENMA 490 - Photoresists

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PhotoresistsPositive ResistsNegative Resists – ChannelsNegative Resists – MoldPhotoresistsTheresa Valentine9/25/03Positive Resistsmask1813Au/CrPyrexoriginal wafer developed andetched waferWhere light is transmitted through the mask, photoresist is removed during developing.Au/CrPyrexSU-8PyrexNegative Resists – ChannelsSU-8PyrexWhere light is transmitted through the mask, photoresist cross-links and is not removed during developing.maskoriginal wafer developed waferNegative Resists – MoldWhere light is transmitted through the mask, photoresist cross-links and is not removed during developing.SU-8PyrexmaskSU-8Pyrexoriginal wafer developed


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UMD ENMA 490 - Photoresists

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