APh‐9aSolid State ElectronicsOskar Painter (Steele 225)Kent Potter (technical support)Kent Potter (technical support)Kate Finigan (admin support)The Electronics Revolution IntegratedCircuitTransistorVacuum tubeEarly “Electronics”Micro-Electronics Pioneer, Jack KilbyFrom Kilby’s Nobel 2000 Essay…Real transistor structure based on a triple‐diffused NPN poly‐emitter BJT produced by Intel 0.8 micron Bi‐CMOS process:produced by Intel 0.8 micron BiCMOS process:Where have we come from?As the drain voltage is increased, the inversion voltage is reducedComplementary MOS (or CMOS) provides the basis of modern Silicon electronicselectronicsConcept of mask transfer for IC fabricationfabricationQuartz plateChromium tt t bl kpattern to block light The wafer is coated with photosensitive resist, exposedphotosensitive resist, exposed and then developed and rinsedProcess sequence of a typicalof a typical lithographic processMetallizationMetallizationEnd of Lecture #1,