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UMD ENMA 490 - Multilayer Microfluidics

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Multilayer Microfluidics_______________________________________________________________­­­­IntroductionProblem Definition:I. To use micro processing techniques to address the problems associated with multi-level channel routing in bio-micro fluidic applicationsII. To integrate materials application for building the layers of a multilevel micro fluidics systemIII. To use a control system to arrange fluidic flow through the multilevel micro fluidicsProblem Scope:The mission of this project is to create a multi-level micro-fluidics system for bio-micro fluidic application. The packaging of this device should be efficient, feasible and versatile because we would want the fluid flow to reach multi-levels instead of remaining on a single layer. Active control devices will control the fluid flow. To flow from one layer to another layer we would have vertical vias or interconnects from the first layer to the next. Therefore to process this we would need the basic knowledge of materials that are feasible and current research accomplished on micro fluidics. These are mentioned in the Materials Information and Literature Research section.Due to time budget our group decided to neglect the biochemistry interactions of the fluid and the interior walls of the channels. We will only consider the fluid flow and how to transport the fluid from one reservoir to another within the system. We will be looking at many control systems that will manage the fluid flow throughout the channels and interconnects. All the control systems we will be discussing will be internally integrated within the micro fluidics system. The design of the control system will be discussed more thoroughly in stage 3 of the Devices Design Stages. Therefore the biochemistry interactions will not be discussed in our report due to time constraints, and we will not use external control systems.Initial Materials Information:Device Design Overview:In each device design stages we will have objectives, device logic, device dimensions, materials used in the design, the processing method, additional issues, manufacturing results and experimental results.The initial micro-channel design consists of only 2 layers with interconnects. The initial design purpose is only used to test if the fluid flows through channels. Controls are neglected in this design because if fluid cannot flow through the channels then adding controls will not necessary. The second stage is the modified version of stage one which is designed to fit the packaging that will be used during testing. The third stage and final design stage consists of an actuated valve that will allow control over fluid flow. Within each stage are fabrication and experimental results that leads to transition from one stage to the next.Device Design Stage 1: Initial Microchannel Test DesignDevice Logic:Materials:Processing Method with Mask Design:Device Design Stage 2: Modified Microchannel Test DesignProcessing Method with Mask Design:Fabrication Steps: SU-8 MoldsFabrication Steps: PDMS MicrochannelsExperimental Trials: Phase 2Pressure Actuated Valve Test DesignObjective:Device Logic:Device Dimensions:Fluid Flow ModelingAlternative Actuated Valve DesignsThermally Activated Valves:Preferred Design Elements:IV. Channels:Valves:Scaling:ConclusionAppendixMultilayer Microfluidics_______________________________________________________________Department of Materials Science and EngineeringUniversity of Maryland, College ParkENMA490Fall 2003Susan Beatty, Charles Brooks, Shawna Dean, Mark Hanna, Dan Janiak, Chen Kung, Jia Ni, BryanSadowski, Anne Samuel, Kunal ThakerSpecial Thanks to Dr. Gary Rubloff and Theresa ValentineIntroductionProblem Definition:I. To use micro processing techniques to address the problems associated with multi-level channel routing in bio-micro fluidic applicationsII. To integrate materials application for building the layers of a multilevel micro fluidicssystemIII. To use a control system to arrange fluidic flow through the multilevel micro fluidicsProblem Scope:The mission of this project is to create a multi-level micro-fluidics system for bio-microfluidic application. The packaging of this device should be efficient, feasible and versatilebecause we would want the fluid flow to reach multi-levels instead of remaining on a singlelayer. Active control devices will control the fluid flow. To flow from one layer to another layerwe would have vertical vias or interconnects from the first layer to the next. Therefore toprocess this we would need the basic knowledge of materials that are feasible and currentresearch accomplished on micro fluidics. These are mentioned in the Materials Information andLiterature Research section.Due to time budget our group decided to neglect the biochemistry interactions of the fluidand the interior walls of the channels. We will only consider the fluid flow and how to transportthe fluid from one reservoir to another within the system. We will be looking at many controlsystems that will manage the fluid flow throughout the channels and interconnects. All thecontrol systems we will be discussing will be internally integrated within the micro fluidicssystem. The design of the control system will be discussed more thoroughly in stage 3 of theDevices Design Stages. Therefore the biochemistry interactions will not be discussed in ourreport due to time constraints, and we will not use external control systems.Initial Materials Information:Materials considered for our micro-fluidic design consisted of Pyrex and siliconsubstrates with polydimethylsiloxane (PDMS), (SU-8), and (PMMA) layers. Piezoelectricmaterials were also researched as possible materials for pressure actuated control valves. Ourfinal design utilized silicon as a substrate, with PDMS to form channels and a flexible membranelayer, and SU-8 layers to fabricate rigid fluid flow control gates. We narrowed down our list ofpotential materials by determining the desired material properties in our design as well as theease of manufacturing of each material. Initial Literature Research Results:We divided our group into teams researching different areas of interest includingmicrochannels and control devices. The microchannel team researched multilayer micro-fluidicdesigns. The control device team researched various control valve designs.Single level microfluidic devices are


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