CORNELL MSE 5420 - Baker Metal Deposition (18 pages)

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Baker Metal Deposition



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Baker Metal Deposition

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Lecture Notes


Pages:
18
School:
Cornell University
Course:
Mse 5420 - Flexible Electronics

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Deposition of Thin Metal Films on Polymer Substrates Shefford P Baker Cornell University Department of Materials Science and Engineering Ithaca New York 14853 MS E 5420 Flexible Electronics 18 September 2008 How to make a thin layer Suppose you want to make a thin 1 m metal film on a substrate e g to provide electrical connections to a device on a flexible substrate How could you do it bonding painting difficult to handle nm scale layer trap dirt and voids at interface easy poor control of geometry trap dirt and voids atom by atom can be clean good geometry control expensive Atom by atom deposition processes MECHANISM chemical PHASE physical plasma sputtering reactive sputtering plasma assisted chemical vapor deposition vapor evaporation reactive evaporation chemical vapor deposition liquid hot dip coating solid segregation Overview Introduction Physical Vapor Deposition Vacuum Evaporation Sputtering Chemical Vapor Deposition Deposition of Metals onto Polymers plating anodization Oxidation case hardening Physical Vapor Deposition PVD The basic idea evaporate atoms at a source condense them on a substrate substrate Source atoms may be vaporized by heating or bombardment with ions and or electrons Substrate may be heated biased rotating translating etc source Vacuum why and what Why vacuum Need to remove other atoms and molecules here generically called particles from the deposition chamber ensure that only film material deposited deposit at an adequate rate long enough Have vacuum Units of pressure Pascal Pa N m2 official SI units torr Torr 1 mm Hg 133 3 Pa conventional unit in the US Bar 100 000 Pa 750 Torr used by some Properties of vacuum Density of particles low compared with atmosphere Particles travel long distances between collisions average distance is mean free path Particles bombard surfaces at a high rate Particles travel at about the speed of sound in dry air approx 330 m s Levels of vacuum Low vacuum to about 10 2 Torr High vacuum 10 2 10 8 Torr Ultra



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