Berkeley ELENG C245 - Lecture 16: Beam Combos (2 pages)

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Lecture 16: Beam Combos



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Lecture 16: Beam Combos

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Lecture Notes


Pages:
2
School:
University of California, Berkeley
Course:
Eleng C245 - Introduction to MEMS Design
Introduction to MEMS Design Documents

Unformatted text preview:

EE 245 Introduction to MEMS Lecture 16 Beam Combos CTN 10 20 09 Folded Beam Stiffness Ratios Folded Beam Suspensions Permeate MEMS In the x direction Folded beam suspension kx 24 EI z L3 In the z direction z direction Same flexure and boundary conditions kz Shuttle In the y direction See Senturia 9 2 Folding truss Anchor EE C245 Introduction to MEMS Design 24 EI x L3 ky 2 Thus k y 4 L kx LecM 8 W C Nguyen Accelerometer ADXL 05 Analog Devices Gyroscope Draper Labs 8 EWh L Much stiffer in y direction 9 28 07 31 Micromechanical Filter K Wang Univ of Michigan EE C245 Introduction to MEMS Design LecM 8 C Nguyen 9 28 07 32 9 28 07 34 Folded Beam Suspensions Permeate MEMS Below Micro Oven Controlled Folded Beam Resonator Stressed Folded Flexures EE C245 Introduction to MEMS Design LecM 8 C Nguyen 9 28 07 33 Copyright 2009 Regents of the University of California EE C245 Introduction to MEMS Design LecM 8 C Nguyen 1 EE 245 Introduction to MEMS Lecture 16 Beam Combos CTN 10 20 09 Clamped Guided Beam Under Axial Load Important case for MEMS suspensions since the thin films Straight flexures comprising them are often under residual stress Consider small deflection case y x L z x Large tensile S means flexure behaves like a tensioned wire for which k 1 L S Large g compressive p S can lead to buckling g k 1 Folded flexures L Residual stress only partially released Length from truss to shuttle s centerline differs by Ls for inner and outer legs y W G vernin differential equati Governing equation n Euler Beam Equation Equati n Axial Load EE C245 Introduction to MEMS Design LecM 8 Design Implications Unit impulse x L C Nguyen 9 28 07 35 Copyright 2009 Regents of the University of California EE C245 Introduction to MEMS Design LecM 8 C Nguyen 9 28 07 40 2



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