Berkeley ELENG C245  Design of a Micromachined Geneva Wheel (4 pages)
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Design of a Micromachined Geneva Wheel
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Design of a Micromachined Geneva Wheel as a mechanism to obtain intermittent motion from a constantly rotating source Varadarajan Vidya Department of Electrical Engineering University of California Berkeley Palani Kumaresan Department of Mechanical Engineering University of California Berkeley period of tr when it is moving along with disk W and an idling time period ti when the pin a is not inside one of the slots s and is moving freely The three quarter wheel L is placed in order to prevent any unintentional rotation of wheel G while it is idling For a four slot Geneva mechanism the rotation time period tr is one third the idling time period ti 1 ABSTRACT Converting constant rotary motion into intermittent rotary motion gives rise to a range of useful applications in silicon micromachining This paper discusses the design and fabrication of one such mechanism called the Geneva Wheel mechanism The standard SUMMiT process has been made use of in developing this All the related mathematics of the Geneva wheel was developed and the system was analysed Keywords Geneva SUMMiT Process Mechanism Microengines By varying the number of slots on G one can vary the time period and the angular displacement of the same If this system is now coupled with some optical system like a micromirror through a rack and pinion kind of arrangement then it can be used to deflect light rays in different directions by discretely positioning the moving mirror by using the discrete angular positions of the Geneva wheel thereby giving rise to an optical switching technique Sandia 1 INTRODUCTION With the introduction of 4 and 5 level polysilicon surface micromachining technology by the Sandia National Laboratories a whole new range of mechanisms have been made possible at the micro level Primary amongst these are the microengines that have in turn been used in a variety of applications Since the output of a microengine is some sort of a continuous motion most of the applications so far using
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