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ALKENE BASED MONOLAYER FILMS AS ANTI-STICTION COATINGS FOR POLYSILICON MEMS



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ALKENE BASED MONOLAYER FILMS AS ANTI STICTION COATINGS FOR POLYSILICON MEMS W Robert Ashurst Christina Yau Carlo Carraro Roger T Howe and Roya Maboudian Berkeley Sensor Actuator Center Department of Chemical Engineering Departments of Electrical Engineering and Computer Sciences and Mechanical Engineering University of California at Berkeley Berkeley CA 94720 1492 USA tel 510 643 3489 fax 510 642 4778 ashurbr uclink4 berkeley edu ABSTRACT This paper describes a new class of anti stiction coatings for silicon MEMS that is based on the free radical reaction of a primary alkene e g 1 octadecene C16H33CH CH2 with hydrogen terminated silicon 1 2 The new monolayer coating has several key advantages over the previously reported octadecyltrichlorosilane OTS and 1H 1H 2H 2Hperfluorodecyltrichlorosilane FDTS based self assembled monolayers SAMs 3 4 1 The coating does not produce HCl at any stage in the monolayer formation whereas chlorosilane based chemistry does 2 The coating does not require the formation of an intervening oxide layer 3 The film formation procedure for alkene based monolayers is simpler than for chlorosilane based SAMs for two main reasons First the surface oxidation step is eliminated Second the coating solution does not need to be conditioned before use since water is not a reagent in this process 4 The coating process is much more robust since it is essentially insensitive to relative humidity 5 The coated surfaces have much fewer particulates in comparison to those coated with OTS 6 The coating process can be made selective to coat only exposed silicon by generating radicals using a radical initiator The coating is evaluated in several ways including X ray photoelectron spectroscopy XPS atomic force microscopy AFM contact angle analysis CAA work of adhesion by cantilever beam array technique and coefficient of static friction using a sidewall testing device The octadecene film is compared to the OTS SAM with respect to anti stiction properties XPS data



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