EE 245: Introduction to MEMSLecture 10: Surface Micromachining IIICTN 9/29/09Copyright © 2009 Regents of the University of California• Announcements:• HW#2 is due tomorrow night at 7 p.m.• Time for Make-Up Lectures:ª Lec: M 5-6:30; Dis: Th 3:30-5• ---------------------------------• Today:• Reading: Senturia Chpt. 3, Jaeger Chpt. 11, Handout: “Surface Micromachining for Microelectromechanical Systems”• Lecture Topics:ª Polysilicon surface micromachiningª Stictionª Residual stressª Topography issuesª Nickel metal surface micromachiningª 3D “pop-up” MEMSª Foundry MEMS: the “MUMPS” processª The Sandia SUMMIT process• ----------------------------------• Last Time:EE 245: Introduction to MEMSLecture 10: Surface Micromachining IIICTN 9/29/09Copyright © 2009 Regents of the University of
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