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UMD ENMA 490 - Inorganic Materials For Biomem

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Inorganic Materials For BiomemsInorganic MaterialsThin-Film Shape-Memory Alloy Actuated MicropumpNiTi/Si Diaphragm MicropumpNiTi/Si MicropumpThick-film Piezoelectric ActuationSlide 7ReferencesInorganic Materials ForBiomemsAnne SamuelInorganic MaterialsMaterials used for micropumps and valvesThin-Film Shape Memory Alloy(NiTi) Actuated Micropump NiTi/Si Diaphragm MicropumpMicromachined pump based on thick-film piezoelectric actuation.Thin-Film Shape-Memory Alloy Actuated MicropumpShape memory alloys are ones which undergoes phase transformation from one phase(austenite) to an another phase( Maternsite).Used one way shape memory effect (OWSME) for actuation.Two actuation configurations to perform actuation- Polyimide-Spring-Biased actuator(Polyimide + TiNi) & Complementary Actuator ( TiNi+TiNi).NiTi/Si Diaphragm MicropumpMicropump actuated by NiTi/Si composite diaphragm.The recoverable force of NiTi thin film and biasing force of silicon membrane allows reciprocating motion of the pump.Structure of a unit SMA/substrate bimorph.NiTi/Si MicropumpAnalysis of the actuation mechanism.Thermal expansion coefficients of Si and SMA are different.Depending on temperature, the bimorph structure will deform or be flat.Thick-film Piezoelectric ActuationMicropump with thick film /silicon micromachined hybrid actuation.Actuation based on the flexure of screen printed PZT layer on Si membrane.Schematic of hybrid actuated micropump.Pump consists of top electrode, bottom electrode and PZT layer in the middle.Thick-film Piezoelectric ActuationExperiment with different bottom electrodes.To find high dielectric values of PZT layer-gives good mechanical acutation performance.It was found that Au Cermet and evaporated Pt thin film gives good dielectric constant.Candidate in medicine as a cheap disposable pump for drug dispensing.ReferencesBernard.W, Kahn.H et.al. “ Thin-film shape memory alloy actuated micropumps”. Journal of Microelectromechanical system.1998. Vol 7. PP 245-251.Koch.H, Harris.N et.al. “A novel micromachined pump based on thick-film piezoelectric actuation”. Sensors and Actuators, 1998. Vol 70. PP 98-103.Xu.D, Wang.Li, et.al. “Characteristics and Fabrication of NiTi/Si diaphragm micropump”. Sensors and Actuators, 2001. Vol 93. PP


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UMD ENMA 490 - Inorganic Materials For Biomem

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