Top View Currently (w/o mods)Top View (w/ mask mods)Top View (w/ Gas Lines)Side View (Cut 1)Side View (Cut 2)PHASE 2: Side View (Cut 3)PHASE 3: With PiezoTop View Currently (w/o mods)Inputs/OutputsBottom LayerTop LayerInterconnectsTop View (w/ mask mods)Bottom LayerTop LayerInterconnectsInputs/OutputsTop View (w/ Gas Lines)Bottom LayerTop LayerInterconnectsInputs/OutputsGas Line LayerWhere the cut will be done for the side viewCut 1Cut 2Cut 3Side View (Cut 1)Top LayerTop Fluid LayerThin Flex LayerGas LayerBottom Fluid LayerSubstrateSide View (Cut 2)Top LayerTop Fluid LayerThin Flex LayerGas LayerBottom Fluid LayerSubstratePHASE 2: Side View (Cut 3)SU-8 Cover LayerSU-8 Top Fluid LayerPDMS Thin Flex Layer PDMS Gas LayerSU-8 Bottom Fluid LayerSubstrate (Si?)Gate ClosedPyrexWafer 1 Wafer 2Gate Open5 masks – 2 black (SU-8 mold), 3 white (SU-8 channels)Need alignment marks (+)PROCESS FLOW = ?PHASE 3: With PiezoSU-8 Cover LayerSU-8 Top Fluid LayerPDMS Thin Flex Layer PDMS Gas LayerSU-8 Bottom Fluid LayerSubstrate (Si?)Gate ClosedPyrexWafer 1 Wafer 2Gate
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