Multilayer Microfluidics_______________________________________________________________Table of ContentsIntroductionProblem DefinitionI. To use micro processing techniques to address the problems associated with multi-level channel routing in bio-micro fluidic applicationsII. To integrate materials application for building the layers of a multilevel micro fluidics systemIII. To use a control system to arrange fluidic flow through the multilevel micro fluidicsProblem ScopeThe mission of this project is to create a multi-level micro-fluidics system for bio-micro fluidic application. The packaging of this device should be efficient, feasible and versatile because we would want the fluid flow to reach multi-levels instead of remaining on a single layer. Active control devices will control the fluid flow. To flow from one layer to another layer we would have vertical vias or interconnects from the first layer to the next. Therefore to process this we would need the basic knowledge of materials that are feasible and current research accomplished on micro fluidics. These are mentioned in the Materials Information and Literature Research section.Due to time budget our group decided to neglect the biochemistry interactions of the fluid and the interior walls of the channels. We will only consider the fluid flow and how to transport the fluid from one reservoir to another within the system. We will be looking at many control systems that will manage the fluid flow throughout the channels and interconnects. All the control systems we will be discussing will be internally integrated within the micro fluidics system. The design of the control system will be discussed more thoroughly in stage 3 of the Devices Design Stages. Therefore the biochemistry interactions will not be discussed in our report due to time constraints, and we will not use external control systems.Initial Materials InformationDevice Design OverviewIn each device design stages we will have objectives, device logic, device dimensions, materials used in the design, the processing method, additional issues, manufacturing results and experimental results.The initial microchannel design consists of only 2 layers with interconnects. The initial design purpose is only used to test if the fluid flows through channels. Controls are neglected in this design because if fluid cannot flow through the channels then adding controls will not necessary. The second stage is the modified version of stage one which is designed to fit the packaging that will be used during testing. The third stage and final design stage consists of an actuated valve that will allow control over fluid flow. Within each stage are fabrication and experimental results that leads to transition from one stage to the next.Device LogicMaterialsProcessing Method with Mask DesignDevice Design Stage 2: Modified Microchannel Test DesignProcessing Method with Mask DesignFabrication Steps: SU-8 MoldsFabrication Steps: PDMS MicrochannelsExperimental TrialsDevice Design Stage 3: Pressure Actuated Valve Test DesignObjectiveDevice LogicDevice DimensionsMembrane Deflection ModelingFluid Flow ModelingAlternative Valve DesignsThermally Activated ValvesPreferred Design ElementsChannelsValvesScalingConclusionAppendixMultilayer Microfluidics_______________________________________________________________Department of Materials Science and EngineeringUniversity of Maryland, College ParkENMA490Fall 2003Susan Beatty, Charles Brooks, Shawna Dean, Mark Hanna, Dan Janiak, Chen Kung, Jia Ni, BryanSadowski, Anne Samuel, Kunal ThakerSpecial Thanks to Dr. Gary Rubloff and Theresa ValentineTable of ContentsIntroduction…………………………………………………………………………………………………...3Problem Definition……………………………………………………………………………………..3Problem Scope…………………………………………………………………………………………3Initial Materials Information…………………………………………………………………………...3Initial Literature Research Results……………………………………………………………………..3Device Design Overview………………………………………………………………………………4Device Design Stage 1: Initial Microchannel Test Design……………………………………………….....4Device Objective……………………………………………………………………………………….4Device Logic…………………………………………………………………………………………...4Device Dimensions…………………………………………………………………………………….5Materials………………………………………………………………………………………………..5Processing method with Mask Design………………………………………………………………....5Stage 1 Summary……………………………………………………………………………………....8Device Design Stage 2: Modified Microchannel Test Design………………………………………………8Device Objective……………………………………………………………………………………….8Device Logic…………………………………………………….…………………………………......9Device Dimensions…………………………………………………….………..……………………10Materials…………………………………………………….……………………………...…………10Processing Method with Mask Design………………………………………………………………..10Fabrication Step: SU-8 Molds…………………………………………………….…………………..13Fabrication Steps: PDMS Microchannels…………………………………………………………….13Experimental Trials…………………………………………………….………………………..……14Future Work …………………………………………………….……………………………………16Stage 2 Summary…………………………………………………….……………………………….16Device Design Stage 3: Pressure Actuated Valve Test
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