Applications of Micro Electro Mechanical Systems (MEMS)IntroductionMicro-fabricated Membrane MirrorsMicro-fabricated Membrane MirrorsSlide 5Two Axis Micro-mirrorMicro-MirrorSlide 8Optical Switch2x2 Optical SwitchSlide 11NxN Optical LinkAgilent Bubble SwitchSegmented MirrorsSegmented Micro-MirrorsSlide 16Grating Light Valve (GLV)GLV Projection SystemNext Generation ProjectorsQuestion…???Slide 21Applications of Applications of Micro Electro Mechanical SystemsMicro Electro Mechanical Systems(MEMS)(MEMS)Jobin PhilipIntroductionIC inventionLarge number of transistors on single silicon chipInterconnected to functional circuitsMicro-fabricated Membrane Mirrors12 mm in diameterLess than 1um in thicknessMicro-fabricated Membrane Mirrors Optical SwitchingHigh optical efficiencyGood potential for aberrations correctionCoupling efficiency of 3000 interconnectionsMicro-fabricated Membrane MirrorsTwo Axis Micro-mirrorMicro-MirrorMicro-MirrorOptical Switch2x2 Optical SwitchCross StateBar StateOptical SwitchNxN Optical LinkAgilent Bubble SwitchSegmented Mirrors Space Optical TelecommunicationReliable, Small in size, Light in weight, & Easy to fabricateAir Turbulence causes optical aberrationsQuick response time, therefore able correct optical aberrationsSegmented Micro-MirrorsSegmented Micro-MirrorsGrating Light Valve (GLV)Incident ReflectedOth ModeRibbonsSilicon Light Machines: http://www.siliconlight.comIncidentDiffractedDiffracted +1st Mode+3rd ModeDown ribbonsUp ribbonsGLV Projection SystemDigital Projection System using Grating Light ValveIf pixel is “off”, light is reflected straight off GVL into the absorbing screenIf pixel is “on”, light is diffracted at an angle, propagating through the lens to the focal planeGLVColor WheelLensFocal PlanePrismScreenOptical InputNext Generation ProjectorsQuestion…???Optical