EE 245: Introduction to MEMSLecture 26: GyroscopesCTN 12/1/09Copyright © 2009 Regents of the University of California• Announcements:• HW#7 emailed last week on Thursday AM; it’s now online and due Thursday next week• Reading: Senturia, Chpt. 14• Lecture Topics:ª Detection Circuits― Velocity Sensing― Position Sensing• Reading: Senturia, Chpt. 16, Chpt. 21• Lecture Topics:ª Gyroscopesª Gyro Circuit Modelingª Minimum Detectable Signal (MDS)― Noise― Angle Random Walk (ARW)• --------------------------------------• Missing Info in HW#7:• --------------------------------------• Last Time:v1VPFd1d1d2Electrode 2Electrode 1i1C1C2kmxbEE 245: Introduction to MEMSLecture 26: GyroscopesCTN 12/1/09Copyright © 2009 Regents of the University of CaliforniaSuspension Beam in TensionProof MassSense Finger-VPEE 245: Introduction to MEMSLecture 26: GyroscopesCTN 12/1/09Copyright © 2009 Regents of the University of California-VP• Go through slide 20 in Module 14• Go through Module 15, slides
View Full Document
Unlocking...