UW-Madison G 777 - Focused ion beam milling (6 pages)

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Focused ion beam milling



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Focused ion beam milling

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Lecture Notes


Pages:
6
School:
University of Wisconsin, Madison
Course:
G 777 - Electron Microprobe Analysis
Electron Microprobe Analysis Documents

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American Mineralogist Volume 86 pages 1094 1099 2001 Focused ion beam milling A method of site specific sample extraction for microanalysis of Earth and planetary materials PETER J HEANEY 1 EDWARD P VICENZI 2 LUCILLE A GIANNUZZI 3 AND KENNETH J T LIVI4 2 1 Department of Geosciences 309 Deike Penn State University University Park Pennsylvania 16802 U S A Department of Mineral Sciences National Museum of Natural History Smithsonian Institution Washington D C 20560 0119 U S A 3 Department of Mechanical Materials and Aerospace Engineering University of Central Florida Orlando Forida 32816 U S A 4 Department of Earth and Planetary Sciences The Johns Hopkins University Baltimore Maryland 21218 U S A ABSTRACT Argon ion milling is the conventional means by which mineral sections are thinned to electron transparency for transmission electron microscope TEM analysis but this technique exhibits significant shortcomings In particular selective thinning and imaging of submicrometer inclusions during sample milling are highly problematic We have achieved successful results using the focused ion beam FIB lift out technique which utilizes a 30 kV Ga ion beam to extract electron transparent specimens with nanometer scale precision Using this procedure we have prepared a number of Earth materials representing a range of structures and compositions for TEM analysis We believe that FIB milling will create major new opportunities in the field of Earth and planetary materials microanalysis particularly with respect to ultraprecious mineral and rock samples INTRODUCTION The introduction of ion milling in the 1950s for the preparation of mineral specimens for use with the TEM revolutionized the study of earth materials Castaing and Labourie 1953 Paulus and Reverchon 1961 Barber 1970 Previous approaches to TEM examination of metals and biological tissues yielded unsatisfactory results when applied to the brittle oxides that comprise the bulk of the Earth and many meteorites However a new



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