Multilayer MicrofluidicsI. IntroductionA. Problem Definitioni. To use microprocessing techniques to address the problems associated with multi-level channel routing in bio-micro fluidic applications.B. Problem Scopei. Requirementsa. To make a multi-level micro fluidic deviceb. To integrate the device with a simple packaging solutionc. To incorporate active control elements to manipulate fluid flowii. Constraints/ Assumptionsa. Externally pumped fluid flow: No need to design on-chip pumpingb. Neglect the bio-chemistry at the test sites: Only consider how the fluid is to be transportedC. Initial Materials Informationi. Reasons for narrowing the list of potential materialsii. Overview of the mechanical and electrical properties of each materialiii. Process considerations for each type of materialD. Initial literature research resultsi. Discussion of the predominate designs and processes currently researcheda. Valvesb. Channel routingc. Electrical Connectionsd. Electrokinetics, etc.ii. Conclusions drawn from initial literature researchE. Device Design Overviewi. Brief summary of each Device Design Stage up to the final design Selectionii. Includes the chart outlining the major points of each device stage.II. Device Design StagesA. Stage 1: Initial Microchannel Test Designi. Objective: To test the feasibility of a Multi-level microfluidic systemii. Device Logiciii. Device Dimensions and Geometryiv. Materialsv. Processing Method with Mask Designvi. Additional Issuesvii. Manufacturing Results: Noneviii. Experimental Results: Noneix. Conclusions from Stage 1 and Transition to Stage 2B. Stage 2: Modified Microchannel Test Designi. Objective: To adapt the initial Microchannel Test Design to fit within the existing packaging parametersii. Device Logiciii. Device Dimensions and Geometryiv. Materialsv. Processing Method with Mask Designvi. Additional Issuesvii. Manufacturing Resultsviii. Experimental Resultsix. Conclusions from Stage 2 and Transition to Stage 3C. Stage 3: Pressure Actuated Valve Test Designi. Objective: To integrate an active control element into a basic microchannel design based on Stage 2.ii. Device Logiciii. Device Dimensions and Geometryiv. Materialsv. Processing Method with Mask Designvi. Additional Issuesvii. Manufacturing Resultsviii. Experimental Resultsix. Conclusions from Stage 3 and Transition to Stage 4III. Final DesignA. Final Manufactured Designi. Discussion of Stage 3B. Final Proposed Designsi. Reason for selection of the Final Proposed Design and differences with between the final manufactured and proposed designsii. Device Logiciii. Device Dimensions and Geometryiv. Materialsv. Processing Method with Mask Designvi. Additional Issuesvii. Manufacturing Results: Noneviii. Experimental Results: NoneC. Conclusions from Final Design SelectionsIV. Future work and possible ideas for alternative structuresV. Project developmentVI. ConclusionsVII. AppendixA. Minutes of the Meetings and Outline of Major group decisionsMultilayerMicrofluidicsI. IntroductionA. Problem Definitioni. To use microprocessing techniques to address the problems associated with multi-level channel routing in bio-micro fluidic applications.B. Problem Scopei. Requirementsa. To make a multi-level micro fluidic deviceb. To integrate the device with a simple packaging solutionc. To incorporate active control elements to manipulate fluid flowii. Constraints/ Assumptionsa. Externally pumped fluid flow: No need to design on-chip pumpingb. Neglect the bio-chemistry at the test sites: Only consider how the fluid is tobe transportedC. Initial Materials Informationi. Reasons for narrowing the list of potential materialsii. Overview of the mechanical and electrical properties of each materialiii. Process considerations for each type of materialD. Initial literature research resultsi. Discussion of the predominate designs and processes currently researcheda. Valvesb. Channel routingc. Electrical Connectionsd. Electrokinetics, etc.ii. Conclusions drawn from initial literature researchE. Device Design Overviewi. Brief summary of each Device Design Stage up to the final design Selectionii. Includes the chart outlining the major points of each device stage.Device StagesObjectivesDevice LogicDevice DimensionsMaterialsProcessing MethodAdditional IssuesManufacturing Results Experimental ResultsConclusions1 2 3 4 Final Manufactured Design Final Proposed DesignII. Device Design StagesA. Stage 1: Initial Microchannel Test Designi. Objective: To test the feasibility of a Multi-level microfluidic systemii. Device Logiciii. Device Dimensions and Geometryiv. Materialsv. Processing Method with Mask Designvi. Additional Issuesvii. Manufacturing Results: Noneviii. Experimental Results: Noneix. Conclusions from Stage 1 and Transition to Stage 2B. Stage 2: Modified Microchannel Test Designi. Objective: To adapt the initial Microchannel Test Design to fit within the existing packaging parametersii. Device Logiciii. Device Dimensions and Geometryiv. Materialsv. Processing Method with Mask Designvi. Additional Issuesvii. Manufacturing Resultsviii. Experimental Resultsix. Conclusions from Stage 2 and Transition to Stage 3C. Stage 3: Pressure Actuated Valve Test Designi. Objective: To integrate an active control element into a basic microchannel design based on Stage 2.ii. Device Logiciii. Device Dimensions and Geometryiv. Materialsv. Processing Method with Mask Designvi. Additional Issuesvii. Manufacturing Resultsviii. Experimental Resultsix. Conclusions from Stage 3 and Transition to Stage 4III. Final DesignA. Final Manufactured Designi. Discussion of Stage 3B. Final Proposed Designsi. Reason for selection of the Final Proposed Design and differences withbetween the final manufactured and proposed designsii. Device Logiciii. Device Dimensions and Geometryiv. Materialsv. Processing Method with Mask Designvi. Additional Issuesvii. Manufacturing Results: Noneviii. Experimental Results: NoneC. Conclusions from Final Design SelectionsIV. Future work and possible ideas for alternative structuresV. Project developmentVI. Conclusions VII. AppendixA. Minutes of the Meetings and Outline of Major group