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A LOW-VOLTAGE TILTABLE MICROPLATFORM USING BENT-BEAM ACTUATION



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Y Xie and C T C Nguyen A low voltage tiltable microplatform using bent beam actuation Tech Digest 2002 Solid State Sensor Actuator and Microsystems Workshop Hilton Head South Carolina June 2 6 2002 pp 350 353 A LOW VOLTAGE TILTABLE MICROPLATFORM USING BENT BEAM ACTUATION Yuan Xie and Clark T C Nguyen Center for Integrated Microsystems Department of Electrical Engineering and Computer Science University of Michigan Ann Arbor Michigan 48109 2122 U S A ABSTRACT A tiltable microplatform for adaptive artificial vision applications has been demonstrated that utilizes special bent beam electrostatic actuators to achieve DC tilt angles larger than 10o with actuation voltages less than 20V and a resonance tilt angle of 19o when driven to resonance at 33 kHz via a combination of 14V DC plus 5V AC This bent beam actuation mechanism has the further advantage that its physical implementation is out of the way of the microplatform itself making it amenable to applications where light must pass through the platform and substrate e g adaptive vision Collection Collimating Tiltable Detector Lens Lens Prism Array Array Array Array Incoming Light White Light In the wake of rapid advancements in optical MEMS technology spurred by the telecommunications industry micromechanical actuation mechanisms capable of generating plate tilt angles on the order of 10o are now commonplace 1 3 Among the various actuation strategies vibromotor 1 and bimorph 2 methods stand out as some of the most voltage efficient requiring 20V AC and 1 2 V but with considerable power consumption respectively to attain tilt angles greater than 10o in large plates often for optical scanning applications However actuation methods capable of low power low voltage tilt actuations of plates that allow light to pass through a 3D array of elements are fewer in number 3 and most require excessive power or voltage levels One such 3D arrayed application for which this work is specifically targeted is the adaptive artificial



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