View Full Document

MEMS Technologies and Devices for Single-Chip RF Front-Ends



View the full content.
View Full Document
View Full Document

3 views

Unformatted text preview:

MEMS Technologies and Devices for Single Chip RF Front Ends Clark T C Nguyen Dept of Electrical Engineering Computer Science University of Michigan Ann Arbor Michigan 48105 2122 CICMT 06 April 25 2006 C T C Nguyen MEMS Technologies and Devices for Single Chip RF Front Ends CICMT 06 4 25 06 Outline Motivation Miniaturization of Transceivers need for high Q merged transistor MEMS process High Q Vibrating Micromechanical Resonators clamped clamped beams micromechanical disks micromechanical circuits Low loss Micromechanical Switches Tunable C s and L s Conclusions C T C Nguyen MEMS Technologies and Devices for Single Chip RF Front Ends CICMT 06 4 25 06 Motivation Miniaturization of RF Front Ends RF RFPower Power Amplifier Amplifier Diplexer Diplexer 925 960MHz 925 960MHz RF RFSAW SAWFilter Filter 897 5 17 5MHz 897 5 17 5MHz RF RFSAW SAWFilter Filter 1805 1880MHz 1805 1880MHz RF RFSAW SAWFilter Filter Dual Band Dual BandZero IF Zero IF Transistor TransistorChip Chip 26 MHz 26 MHzXstal Xstal Oscillator Oscillator Problem Problem high Q high Qpassives passivespose poseaa bottleneck bottleneckagainst againstminiaturization miniaturization 3420 3840MHz 3420 3840MHz VCO VCO Antenna Mixer I LPF I A D Diplexer AGC 0o 90o Wireless Phone RF BPF LNA RF PLL RXRF LO Xstal Osc Q A D From TX Mixer Q C T C Nguyen MEMS Technologies and Devices for Single Chip RF Front Ends CICMT 06 4 25 06 LPF AGC Multi Band Wireless Handsets I Duplexer CDMA LNA RF BPF From TX Antenna RF BPF LPF 0o 90o RF BPF PCS 1900 I A D Q AGC GSM 900 LNA A D LPF Q I AGC LNA RF BPF DCS 1800 RXRF LO 0o 90o N 1 N LNA Duplexer CDMA 2000 Duplexer WCDMA RXRF Channel Select PLL RF BPF LNA From TX RF BPF LNA From TX Xstal Osc Q Tank The number of off chip high Q passives increases dramatically Need on chip high Q passives C T C Nguyen MEMS Technologies and Devices for Single Chip RF Front Ends CICMT 06 4 25 06 Surface Micromachining Fabrication steps compatible with planar IC processing C T C Nguyen MEMS Technologies and



Access the best Study Guides, Lecture Notes and Practice Exams

Loading Unlocking...
Login

Join to view MEMS Technologies and Devices for Single-Chip RF Front-Ends and access 3M+ class-specific study document.

or
We will never post anything without your permission.
Don't have an account?
Sign Up

Join to view MEMS Technologies and Devices for Single-Chip RF Front-Ends and access 3M+ class-specific study document.

or

By creating an account you agree to our Privacy Policy and Terms Of Use

Already a member?