View Full Document

Microrelay design, performance, and systems



View the full content.
View Full Document
View Full Document

13 views

Unformatted text preview:

Microrelay design performance and systems http www bsac eecs berkeley edu Ezekiel J J Kruglick Berkeley Senson and Actuator Center 497 Cory Hall Berkeley CA 94720 1770 USA Microrelay design performance and systems Ezekiel J J Kruglick Berkeley Sensor and Actuator Center Advisor Kristofer S J Pister Microrelay design performance and systems by Ezekiel John Joseph Kruglick B S University of California Los Angeles 1995 M S University of California Los Angeles 1996 A dissertation submitted in partial satisfaction of the requirements for the degree of Doctor of Philosophy in Engineering Electrical Engineering and Computer Science in the GRADUATE DIVISION of the UNIVERSITY of CALIFORNIA BERKELEY Committee in charge Professor Kristofer S J Pister Chair Professor Roger Howe Professor Richard White Professor Dorian Liepmann Spring 1999 Abstract Microrelay design performance and systems by Ezekiel John Joseph Kruglick Doctor of Philosophy in Electrical Engineering and Computer Science University of California Berkeley Professor Kristofer S J Pister Chair Surface micromachined four terminal relays have been fabricated tested and packaged The relays are implemented in a foundry process with minimal post processing They show on resistances as low as 20m current carrying capacities as high as 0 48 Amps and lifetimes in the millions of cycles while hot switching 80mA These devices are thus competitive with commercial macroscopic relays Achieving these high performance and reliability levels required exploring the physics and tribology of microrelays and using novel physical experiments to outline a design philosophy for microrelays This philosophy with standard macrorelay design methods by recommending small gaps light mechanical elements and low force levels These differences from the standard relays design philosophy how Microrelay design performance and systems 1 ever are supported by theory and experiment and stem from the basic physical differences between designing at the



Access the best Study Guides, Lecture Notes and Practice Exams

Loading Unlocking...
Login

Join to view Microrelay design, performance, and systems and access 3M+ class-specific study document.

or
We will never post anything without your permission.
Don't have an account?
Sign Up

Join to view Microrelay design, performance, and systems and access 3M+ class-specific study document.

or

By creating an account you agree to our Privacy Policy and Terms Of Use

Already a member?