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Microrelay design, performance, and systems

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Microrelay design, performance, and systemsEzekiel J.J. KruglickBerkeley Sensor and Actuator CenterAdvisor: Kristofer S.J. PisterBerkeley Senson and Actuator Center497 Cory HallBerkeley, CA 94720-1770, USAhttp://www-bsac.eecs.berkeley.eduMicrorelay design, performance, and systemsEzekiel J. J. KruglickMicrorelay design, performance, and systemsbyEzekiel John Joseph KruglickB.S. (University of California, Los Angeles) 1995M.S. (University of California, Los Angeles) 1996A dissertation submitted in partial satisfaction of the requirements for the degree of Doctor of PhilosophyinEngineering - Electrical Engineering and Computer Sciencein the GRADUATE DIVISIONof theUNIVERSITY of CALIFORNIA, BERKELEYCommittee in charge:Professor Kristofer S. J. Pister, ChairProfessor Roger HoweProfessor Richard WhiteProfessor Dorian LiepmannSpring 1999Microrelay design, performance, and systems1AbstractMicrorelay design, performance, and systemsbyEzekiel John Joseph KruglickDoctor of Philosophy in Electrical Engineering and Computer ScienceUniversity of California, BerkeleyProfessor Kristofer S. J. Pister, ChairSurface micromachined four terminal relays have been fabricated, tested, and pack-aged. The relays are implemented in a foundry process with minimal post-process-ing. They show on resistances as low as 20mΩ, current carrying capacities as high as 0.48 Amps, and lifetimes in the millions of cycles while hot switching 80mA. These devices are thus competitive with commercial macroscopic relays.Achieving these high performance and reliability levels required exploring the physics and tribology of microrelays and using novel physical experiments to out-line a design philosophy for microrelays. This philosophy with standard macrorelay design methods by recommending small gaps, light mechanical elements, and low force levels. These differences from the standard relays design philosophy, how-Microrelay design, performance, and systems2ever, are supported by theory and experiment and stem from the basic physical dif-ferences between designing at the macro scale and the micro scale.Finally, system design is explored and computation using microrelays is demon-strated as a new application made possible by the tiny scale of these relays.________________________________Professor Kristofer S. J. Pister Committee ChairMicrorelay design, performance, and systemsiiiDedicationThis dissertation is dedicated to my two grandfathers, from whom my middle names come: John Kruglick and Joseph Lorenz. Though I did not finish graduate school quite fast enough to share graduation with them their impact has been vast.I will always remember Joseph Lorenz as a strongman. During the depression he found work as a circus strongman, lifting barrels of concrete over his head and bursting iron bands riveted around his biceps. He went on to apply his iron will to machining, becoming a legendary tool and die maker and craftsman with parts in every 747 made during his lifetime and parts on every moon landing. Joseph Lorenz was well known for making numerous parts that conventional wisdom said could not be made. When he announced his impending retirement at the age of 79 with a total of 67 years of machine shop experience under his belt Joseph LorenzMicrorelay design, performance, and systemsivwas suddenly deluged with two years worth of orders from desperate suppliers. He continued to work his usual 7-days-a-week 18-hours-a-day schedule until they were done. He was killed by an unknown driver in a hit and run accident shortly after his retirement August 3, 1992.During my entire lifetime Joseph Lorenz lived in his machine shop (a Quonset hut) inside a single home-built freestanding room the exact size of two sheets of ply-wood. Whenever I would visit him I would spend my time poking around his machine shop and watching him work with enormous hydraulic equipment. His stoic willpower in the face of the inevitable injuries stemming from decades of machine shop work and the travails of living modestly in a quonset hut in Los Angeles were always a source of inspiration to me. No matter how hard things have gotten, I could always picture my grandpa Joe smiling at the situation and laughing. It’s helped. I also can’t help but suspect that my predilection for machining and engineering come from growing up with a grandfather like Joe.John Kruglick was the youngest of seven Jewish siblings who came to the U.S. fleeing pogroms in the Ukraine. As a youth from the wrong side of the tracks John learned English and managed to get through medical school supported by one of the elder siblings, Lewis; a grocer whom my own father was named after. John Kruglick allowed nothing to stand in his way and after serving in world war two he started a medical practice, raised a number of children, and even campaigned forMicrorelay design, performance, and systemsvthe Senate. John Kruglick impressed upon his children the opportunity and honor represented in a good education, leading to a family tradition of high educational achievement. It is to this side of the family that I credit my proclivities toward advanced degrees and I regret deeply that John will not be able to watch his grand-son receives a Ph.D. as he watched his son get an MD. Unfortunately he was claimed by age in October of 1998.Do not stand at my grave and weep,I am not there, I do not sleep.I am a thousand winds that blow,I am the diamond glints on snow.I am the sunlight on ripened grain,I am the gentle autumn rain.When you awaken in morning’s hush,I am the swifter uplifting rushOf quiet birds in circled flight.I am the soft star that shines at night.Do not stand at my grave and cry,I am not there, I did not die.From the celebration of life of John Sanford Kruglick.Microrelay design, performance, and systemsviAcknowledgmentsI face the usual graduate student problem of being indebted to almost everyone. Every fellow student who ever sat in on one of the late night bull sessions that occur when everyone has been working far too long, every student and staff member who taught me how to use a piece of equipment while listening to inane questions, and every faculty member who patiently explained things deserves a place of acknowl-edgment.I would like to express my deep thanks to the member of the research group, both back in the UCLA days and the newer generation at UCB. In particular Richard Yeh stands out as a beacon of sanity and reliability whose exemplary honesty and humility has been


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