View Full Document

Microrelay design, performance, and systems



View the full content.
View Full Document
View Full Document

23 views

Unformatted text preview:

Microrelay design performance and systems http www bsac eecs berkeley edu Ezekiel J J Kruglick Berkeley Senson and Actuator Center 497 Cory Hall Berkeley CA 94720 1770 USA Microrelay design performance and systems Ezekiel J J Kruglick Berkeley Sensor and Actuator Center Advisor Kristofer S J Pister Microrelay design performance and systems by Ezekiel John Joseph Kruglick B S University of California Los Angeles 1995 M S University of California Los Angeles 1996 A dissertation submitted in partial satisfaction of the requirements for the degree of Doctor of Philosophy in Engineering Electrical Engineering and Computer Science in the GRADUATE DIVISION of the UNIVERSITY of CALIFORNIA BERKELEY Committee in charge Professor Kristofer S J Pister Chair Professor Roger Howe Professor Richard White Professor Dorian Liepmann Spring 1999 Abstract Microrelay design performance and systems by Ezekiel John Joseph Kruglick Doctor of Philosophy in Electrical Engineering and Computer Science University of California Berkeley Professor Kristofer S J Pister Chair Surface micromachined four terminal relays have been fabricated tested and packaged The relays are implemented in a foundry process with minimal post processing They show on resistances as low as 20m current carrying capacities as high as 0 48 Amps and lifetimes in the millions of cycles while hot switching 80mA These devices are thus competitive with commercial macroscopic relays Achieving these high performance and reliability levels required exploring the physics and tribology of microrelays and using novel physical experiments to outline a design philosophy for microrelays This philosophy with standard macrorelay design methods by recommending small gaps light mechanical elements and low force levels These differences from the standard relays design philosophy how Microrelay design performance and systems 1 ever are supported by theory and experiment and stem from the basic physical differences between designing at the macro scale and the micro scale Finally system design is explored and computation using microrelays is demonstrated as a new application made possible by the tiny scale of these relays Professor Kristofer S J Pister Committee Chair Microrelay design performance and systems 2 Dedication This dissertation is dedicated to my two grandfathers from whom my middle names come John Kruglick and Joseph Lorenz Though I did not finish graduate school quite fast enough to share graduation with them their impact has been vast I will always remember Joseph Lorenz as a strongman During the depression he found work as a circus strongman lifting barrels of concrete over his head and bursting iron bands riveted around his biceps He went on to apply his iron will to machining becoming a legendary tool and die maker and craftsman with parts in every 747 made during his lifetime and parts on every moon landing Joseph Lorenz was well known for making numerous parts that conventional wisdom said could not be made When he announced his impending retirement at the age of 79 with a total of 67 years of machine shop experience under his belt Joseph Lorenz Microrelay design performance and systems iii was suddenly deluged with two years worth of orders from desperate suppliers He continued to work his usual 7 days a week 18 hours a day schedule until they were done He was killed by an unknown driver in a hit and run accident shortly after his retirement August 3 1992 During my entire lifetime Joseph Lorenz lived in his machine shop a Quonset hut inside a single home built freestanding room the exact size of two sheets of plywood Whenever I would visit him I would spend my time poking around his machine shop and watching him work with enormous hydraulic equipment His stoic willpower in the face of the inevitable injuries stemming from decades of machine shop work and the travails of living modestly in a quonset hut in Los Angeles were always a source of inspiration to me No matter how hard things have gotten I could always picture my grandpa Joe smiling at the situation and laughing It s helped I also can t help but suspect that my predilection for machining and engineering come from growing up with a grandfather like Joe John Kruglick was the youngest of seven Jewish siblings who came to the U S fleeing pogroms in the Ukraine As a youth from the wrong side of the tracks John learned English and managed to get through medical school supported by one of the elder siblings Lewis a grocer whom my own father was named after John Kruglick allowed nothing to stand in his way and after serving in world war two he started a medical practice raised a number of children and even campaigned for Microrelay design performance and systems iv the Senate John Kruglick impressed upon his children the opportunity and honor represented in a good education leading to a family tradition of high educational achievement It is to this side of the family that I credit my proclivities toward advanced degrees and I regret deeply that John will not be able to watch his grandson receives a Ph D as he watched his son get an MD Unfortunately he was claimed by age in October of 1998 Do not stand at my grave and weep I am not there I do not sleep I am a thousand winds that blow I am the diamond glints on snow I am the sunlight on ripened grain I am the gentle autumn rain When you awaken in morning s hush I am the swifter uplifting rush Of quiet birds in circled flight I am the soft star that shines at night Do not stand at my grave and cry I am not there I did not die From the celebration of life of John Sanford Kruglick Microrelay design performance and systems v Acknowledgments I face the usual graduate student problem of being indebted to almost everyone Every fellow student who ever sat in on one of the late night bull sessions that occur when everyone has been working far too long every student and staff member who taught me how to use a piece of equipment while listening to inane questions and every faculty member who patiently explained things deserves a place of acknowledgment I would like to express my deep thanks to the member of the research group both back in the UCLA days and the newer generation at UCB In particular Richard Yeh stands out as a beacon of sanity and reliability whose exemplary honesty and humility has been reassuring at times when unreasonable people cause chaos Gisela Lin at UCLA deserves special thanks for showing us all just how fun a Microrelay


Access the best Study Guides, Lecture Notes and Practice Exams

Loading Unlocking...
Login

Join to view Microrelay design, performance, and systems and access 3M+ class-specific study document.

or
We will never post anything without your permission.
Don't have an account?
Sign Up

Join to view Microrelay design, performance, and systems and access 3M+ class-specific study document.

or

By creating an account you agree to our Privacy Policy and Terms Of Use

Already a member?