Berkeley ELENG C245 - Lecture 24 (26 pages)

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Lecture 24



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Lecture 24

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Pages:
26
School:
University of California, Berkeley
Course:
Eleng C245 - Introduction to MEMS Design
Introduction to MEMS Design Documents

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EE C245 ME C218 Introduction to MEMS Design Fall 2007 Prof Clark T Prof T C C Nguyen Dept of Electrical Engineering Computer Sciences Dept University of California at Berkeley Berkeley y CA 94720 L t Lecture 24 Input Output 24 I t O t t Modeling M d li EE C245 Introduction to MEMS Design Lecture 24 C Nguyen 11 24 08 1 Lecture Outline Reading g Senturia Chpt p 6 Chpt p 14 Lecture Topics Electrostatic Comb Drive 1st Order Analysis 2nd Order Analysis p p Modeling g Input Output I O Equivalent Circuit Models Electromechanical Coupling Mechanical Coupling Detection Circuits Position Sensing Velocity Sensing Operational Amplifiers EE C245 Introduction to MEMS Design Lecture 24 C Nguyen 11 24 08 2 Comb Drive Force Equation 2nd Pass In our 1st pass we neglected Fringing fields Parallel plate P ll l l capacitance i between b stator and d rotor Capacitance to the substrate All of these capacitors must be included when evaluating the energy expression Stator Rotor Ground Plane EE C245 Introduction to MEMS Design Lecture 24 C Nguyen 11 24 08 3 Comb Drive Force With Ground Plane Correction Finger displacement changes not only the capacitance between stator and rotor but also between these structures and d the h ground d plane l modifies difi the h capacitive i i energy Gary Fedder Fedder Ph D Ph D UC Berkeley 1994 EE C245 Introduction to MEMS Design Lecture 24 C Nguyen 11 24 08 4 Capacitance Expressions Case Vr VP 0V Cspp depends p on whether or not fingers are engaged Capacitance per unit length l h Region 2 Region 3 Gary Fedder Ph D UC Berkeley 1994 EE C245 Introduction to MEMS Design Lecture 24 C Nguyen 11 24 08 5 Comb Drive Force With Ground Plane Correction Finger displacement changes not only the capacitance between stator and rotor but also between these structures and d the h ground d plane l modifies difi the h capacitive i i energy Gary Fedder Ph D UC Berkeley 1994 EE C245 Introduction to MEMS Design Lecture 24 C Nguyen 11 24 08 6 Simulate to Get Capacitors Force Below



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