EE 245: Introduction to MEMSLecture 19: Resonance Frequency IICTN 11/2/09Copyright © 2009 Regents of the University of California• Announcements:• Lecture schedule for the next 4 weeks:• Midterm Exam:ª Tu, Nov. 3, during regular lectureª 1.5 hours, but might go longerMonday Tuesday Wednesday Thursday FridayOct. 5Lecture5-6:30241 Cory6Lecture3:30-5Moffitt7 8Discuss3:30-5Moffitt912Lecture5-6:30241 Cory13 14 15Discuss3:30-5Moffitt1619Lecture5-6:30241 Cory20Lecture3:30-5Moffitt21 22Lecture3:30-5Moffitt2326Discuss3:30-5Moffitt27 2829Lecture3:30-5Moffitt30Nov. 2Lecture5-6:30241 Cory3Midterm3:30-5Moffitt45Lecture3:30-5Moffitt6• Reading: Senturia, Chpt. 10: §10.5, Chpt. 19• Lecture Topics:ª Estimating Resonance Frequencyª Lumped Mass-Spring Approximationª ADXL-50 Resonance Frequencyª Distributed Mass & Stiffnessª Folded-Beam Resonator• --------------------------------------• Last Time:EE 245: Introduction to MEMSLecture 19: Resonance Frequency IICTN 11/2/09Copyright © 2009 Regents of the University of California• Derive an expression for the resonance frequency of the above structurezEE 245: Introduction to MEMSLecture 19: Resonance Frequency IICTN 11/2/09Copyright © 2009 Regents of the University of CaliforniaEE 245: Introduction to MEMSLecture 19: Resonance Frequency IICTN 11/2/09Copyright © 2009 Regents of the University of Californiaz• Go through Module 10 slides 21-31 on your ownEE 245: Introduction to MEMSLecture 19: Resonance Frequency IICTN 11/2/09Copyright © 2009 Regents of the University of CaliforniaFolded-beam suspensionAnchorShuttle w/ mass Msh = thicknessFolding truss w/ mass
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