Material Safety Data Sheet 1. PRODUCT AND COMPANY IDENTIFICATION MICROPOSIT(TM) 353 Developer Revision date: 01/01/2004 Supplier Rohm and Haas Electronic Materials LLC 455 Forest Street Marlborough, MA 01752 United States of America For non-emergency information contact: 508-481-7950 Emergency telephone number Chemtrec 800-424-9300 Rohm and Haas Emergency 215-592-3000 2. COMPOSITION/INFORMATION ON INGREDIENTS Component CAS-No. Concentration Water 7732-18-5 95.0 - 99.0 % Sodium hydroxide 1310-73-2 0.1 - 1.0 % Borate salt 0.0 - 1.0 % sodium tetraborate decahydrate 1303-96-4 1.0 - 5.0 % 3. HAZARDS IDENTIFICATION Emergency Overview Appearance Form liquid Colour clear Odour Odorless Hazard Summary DANGER!Corrosive alkaline liquid and vapor causes severe skin and eye burns. Causes respiratory irritation. Onset of symptoms may be delayed. Potential Health Effects Page 1 of 7 Revision date 01/01/2004 Primary Routes of Entry: Inhalation, ingestion, eye and skin contact.MICROPOSIT(TM) 353 Developer Page 2 of 7 Revision date 01/01/2004 Eyes: Will cause severe conjunctival irritation, corneal damage, and may result in loss of vision. Skin: Material will cause chemical burns. Ingestion: Swallowing may have the following effects: corrosion of mouth, throat and digestive tract Inhalation: Inhalation may have the following effects: severe irritation of nose, throat and respiratory tract Higher concentrations may have the following effects: severe irritation to nose, throat and respiratory tract and possibly lung damage Target Organs: Eye Respiratory System Skin Carcinogenicity Not considered carcinogenic by NTP, IARC, and OSHA 4. FIRST AID MEASURES Inhalation: Remove from exposure. If there is difficulty in breathing, give oxygen. Immediate medical attention is required Skin contact: Immediately flush the skin with large quantities of water, preferably under a shower. If skin contact occurs, remove contaminated clothing and wash skin thoroughly. Continue washing for at least 20 minutes. Contaminated clothing should be washed or dry- cleaned before re-use. Immediate medical attention is required Eye contact: Immediately flush the eye with plenty of water for at least 20 minutes, holding the eye open. Immediate medical attention is required Ingestion: Do not induce vomiting. Wash out mouth with water. Have victim drink 1-3 glasses of water to dilute stomach contents. Immediate medical attention is required Never administer anything by mouth if a victim is losing conciousness, is unconcious or is convulsing. Notes to physician Treat symptomatically. Treat skin burns conventionally. 5. FIRE-FIGHTING MEASURES Flash point Nonflammable Lower explosion limit not applicable Upper explosion limit not applicable Suitable extinguishing media: Use water spray, foam, dry chemical or carbon dioxide. Specific hazards during fire fighting: This product may give rise to hazardous vapors in a fire.MICROPOSIT(TM) 353 Developer Page 3 of 7 Revision date 01/01/2004 Special protective equipment for fire-fighters: Wear full protective clothing and self-contained breathing apparatus. Further information: May emit corrosive vapor or mist. 6. ACCIDENTAL RELEASE MEASURES Personal precautions Wear suitable protective clothing. Wear respiratory protection. Material can create slippery conditions. Environmental precautions Prevent the material from entering drains or water courses. Do not discharge directly to a water source. Advise Authorities if spillage has entered watercourse or sewer or has contaminated soil or vegetation. Methods for cleaning up Spills may be absorbed with appropriate absorbent material for alkaline materials. Transfer into suitable containers for recovery or disposal. 7. HANDLING AND STORAGE Handling Use local exhaust ventilation. Avoid contact with eyes, skin and clothing. Facilities storing or utilizing this material should be equipped with an eyewash facility and a safety shower. Avoid breathing vapor. Keep container tightly closed. Further information on storage conditions: Practice good personal hygiene to prevent accidental exposure. Storage Storage conditions: Store in original container. Storage area should be: cool dry well ventilated out of direct sunlight away from incompatible materials 8. EXPOSURE CONTROLS / PERSONAL PROTECTION Exposure limit(s) Exposure limits are listed below, if they exist. Component Regulation Type of listing ValueSodium hydroxide ACGIH Ceiling 2 mg/m3 OSHA_TRANS PEL 2 mg/m3 Z1A Ceiling 2 mg/m3 Rohm and Haas Ceiling 2 mg/m3 Component Regulation Type of listing Valuesodium tetraborate decahydrate ACGIH TWA 5 mg/m3MICROPOSIT(TM) 353 Developer Page 4 of 7 Revision date 01/01/2004 Eye protection: Chemical goggles and face shield. Hand protection: Neoprene gloves. Other chemical resistant gloves may be recommended by your safety professional. Gauntlet sleeves. Skin and body protection: rubber or neoprene apron Respiratory protection: Respiratory protection if there is a risk of exposure to high vapor concentrations. The specific respirator selected must be based on the airborne concentration found in the workplace and must not exceed the working limits of the respirator. Engineering measures: Engineering methods to prevent or control exposure are preferred. Methods include process or personnel enclosure, mechanical ventilation (local exhaust), and control of process conditions. 9. PHYSICAL AND CHEMICAL PROPERTIES Appearance Form liquid Colour clear Odour Odorless pH >13 Boiling point/range 129 °C (264 °F) Flash point Nonflammable Lower explosion limit not applicable Upper explosion limit not applicable Relative vapour density not applicable Water solubility completely soluble Relative density 1.01 Evaporation rate not applicable VOC's 0 g/l NOTE: The physical data presented above are typical values and should not be construed as a specification. 10. STABILITY AND REACTIVITY Hazardous reactions Stable under normal conditions. Conditions to avoid contact with incompatible materials Materials to avoid acids aldehydes Aromatic hydrocarbon Hydrocarbons Hazardous decomposition products None known.,MICROPOSIT(TM) 353 Developer Page 5 of 7 Revision date 01/01/2004 polymerization Will not occur. 11. TOXICOLOGICAL INFORMATION Toxicological information on this product or its components