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HEADWAY SPINNER OPERATION

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CNS Standard Operation Procedure – 048 Harvard University Rev. 2.2 (09/12/2008) Prepared by L. Xie HEADWAY Spinner Operation Manual IMPORTANT NOTE: DON’T CHANGE RECIPES 1 – 6!!! Use a Pre-Programmed Recipe 1. Select a chuck that fits the sample size. Make sure the sample size is larger than the chuck’s surface area. 2. Center the sample on the chuck. 3. Press “RECIPE” to select a recipe from 1 to 6. 4. Dispense photo resist on the sample. 5. Press the green button on the foot switch to start the spin cycle. 6. After spinning stops, unload the sample. 7. Clean the spinner according to “Cleaning Procedures after SU8 Coating”. 8. Sign the Log Book. Set Up Your Own Recipe 1. Press “RECIPE”, then “0” or any number from 7 to 9, and “ON OR ENTER”. 2. Press “STEP” and “1”. 3. Press “SPEED/RAMP” and enter spinning speed for step 1 and press “ENTER”. 4. Press “SPEED/RAMP” again and enter ramp-up speed and press “ENTER”. 5. Press “STEP TERMINATE” and enter spinning time and press “ENTER”. 6. Repeat steps 2-5 to finish rest of the steps. 7. Press “STEP” and “0” to end editing. 8. Follow steps 4-8 in the previous section “Use a Pre-Programmed Recipe”.CNS Standard Operation Procedure – 048 Harvard University Rev. 2.2 (09/12/2008) Prepared by L. Xie Spinning Conditions of Recipes 1 – 6 Recipe# Step 1 Step 2 Time (s) Ramp up speed (rpm/s) Speed (rpm) Time (s) Ramp up speed (rpm/s) Speed (rpm) 1 5 100 500 60 300 3000 2 5 100 500 30 300 1500 3 5 100 500 30 300 2000 4 5 100 500 30 300 2500 5 5 100 500 30 300 3000 6 5 100 500 30 300 3500 Revision History Revision # Date Authors Changes/Additions 2.1 8/4/2008 FK Minor updates related to use in G06. 2.2 9/12/2008 FK Few minor changes and release of


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