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Fabrication of a Fully-integrated Multiwatt µTurboGenerator



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Fabrication of a Fully integrated Multiwatt TurboGenerator B C Yen M Allen F F Ehrich A H Epstein F Herrault K J Hillman L C Ho S Jacobson J H Lang H Li Z S Spakovszky C J Teo D Veazie Sponsorship US Army Research Laboratory Collaborative Technology Alliance There is a need for compact high performance power sources that can outperform the energy density of modern batteries for use in portable electronics autonomous sensors robotics and other applications Building upon the results presented in 1 the current research is aimed at fabricating a fully integrated multiwatt micro turbogenerator on silicon that can produce 10 W DC output power Figure 1 One of the main challenges in volves the seamless integration between silicon and the magnetic components required to generate power The generator requires a NiFe soft magnetic back iron and laminated stator for flux redirection as well as NdFeB permanent magnet pieces to serve as flux sources Figure 2 In addition copper windings must be fabricated above the laminated stator to couple to the alternating flux in order to extract electrical power from the machine Great strides have been made in the past year to quantify the requirements on the magnet pieces that will go into the rotor housing Manufacturing accuracy of the pieces is critical because variations in the magnet geometries create an overall rotor imbalance which can cause the rotor to crash during p Figure 1 Conceptual rendering of the fully integrated generator Back iron and magnet pieces will be inserted into the empty cavities of the rotor which will be supported by gas thrust and journal bearings Electrical connections are taken out from the backside of the die transcritical operation A procedure in which the gaps around the magnet pieces are filled with solder and then polished back using chemical mechanical planarization has been developed this process can reduce the effective imbalance of the rotor by an order of magnitude The assembly and packaging procedure



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